双光子聚合-微加工的新途径.pdf

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1、WorldwideCoverage:Optics,Lasers,Imaging,FiberOptics,Electro-Optics,PhotonicComponentManufacturing®Two-PhotonPolymerization:ANewApproachtoMicromachiningFemtosecondlasersenablemicrofabricationwithresolutionbeyondthediffractionlimit.byAndreasOstendorfandBorisN.Chichko

2、v,LaserZentrumHannovereVherapidtechnicaldevelop-trashortlaserpulses.1-5Whenlowsfabricationofanycom-mentofultrashortlasersys-focusedintothevolumeofaputer-generated3-DstructureTtemsiscreatingexcitingpos-photosensitivematerial(orpho-bydirectlaser“recording”intosibilit

3、iesforverypreciselocal-toresist),thepulsesinitiatethevolumeofaphotosensitiveizationoflaserenergyintimeandtwo-photonpolymerizationviamaterial(Figure1).space.Theseachievementshavetwo-photonabsorptionandsub-Becauseofthethresholdbe-triggerednovellaserapplicationssequen

4、tpolymerization.Afterhaviorandnonlinearnatureofbasedonnonlinearinteractionilluminationofthedesiredstruc-theprocess,aresolutionbeyondprocesses.turesinsidethephotoresistvol-thediffractionlimitcanbereal-Apromisingthree-dimensionalumeandsubsequentdevelop-izedbycontroll

5、ingthelaserpulsemicrofabricationmethodthatment—e.g.,washingouttheenergyandthenumberofappliedhasrecentlyattractedconsider-nonilluminatedregions—thepulses.Asaresult,thetechniqueableattentionisbasedontwo-polymerizedmaterialremainsinprovidesmuchbetterstructuralphotonpo

6、lymerizationwithul-theprescribed3-Dform.Thisal-resolutionandqualitythantheFigure1.TheseSEMimagesshowamicro-scaledragon(left)andamovablewindmill(right)fabricatedbytwo-photonpolymerizationinorganicallymodifiedceramics.ReprintedfromtheOctober2006issueofPHOTONICSSPECTR

7、A©LaurinPublishingTwo-PhotonPolymerizationwell-knownstereolithographymethod.Three-dimensionalmicro-structuringofphotosensitivema-terialsbytwo-photonpolymer-izationiseffectiveforthefabri-cationof3-Dstructureshavingaresolutionof100nmorbetter.Fortwo-photonpolymerizati

8、onand3-Dmaterialsprocessing,computer-controlledpositioningsystemsarecombinedwithalightsourcethatistypicallyanear-infraredTi:sapphirefem-tosecondl