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1、PressureFreescaleSemiconductorDocumentNumber:MPXHZ6130ARev1.1,05/2010DataSheet:TechnicalDataMediaResistantandHighTemperatureAccuracyIntegratedMPXHZ6130ASiliconPressureSensorforSeriesMeasuringAbsolutePressure,15to130kPa(2.2to18.9psi)0.2to4.8VOutputOn-ChipSignal
2、Conditioned,TemperatureCompensatedandCalibratedTheMPXHZ6130Aseriessensorintegrateson-chip,bipolaropampApplicationExamplescircuitryandthinfilmresistornetworkstoprovideahighoutputsignaland•AviationAltimeterstemperaturecompensation.Thesensor'spackaginghasbeendesi
3、gnedto•IndustrialControlsprovideresistancetohighhumidityconditionsaswellascommonautomotive•EngineControl/ManifoldAbsolutemedia.Thesmallformfactorandhighreliabilityofon-chipintegrationmakePressure(MAP)theFreescaleSemiconductor,Inc.pressuresensoralogicalandecono
4、mical•WeatherStationsandWeatherReportingchoiceforthesystemdesigner.DevicesTheMPXHZ6130Aseriespiezoresistivetransducerisastate-of-the-art,monolithic,signalconditioned,siliconpressuresensor.Thissensorcombinesadvancedmicromachiningtechniques,thinfilmmetallization
5、,andbipolarsemiconductorprocessingtoprovideanaccurate,highlevelanalogoutputsignalthatisproportionaltoappliedpressure.Features•1.5%MaximumErrorOver0°to85°C•ResistanttoHighHumidityandCommonAutomotiveMedia•ImprovedAccuracyatHighTemperature•IdeallysuitedforMicropr
6、ocessororMicrocontroller-BasedSystems•TemperatureCompensatedfrom-40°to+125°C•DurableThermoplastic(PPS)SurfaceMountPackageORDERINGINFORMATIONPackageCase#ofPortsPressureTypeDeviceNameDeviceMarkingOptionsNo.NoneSingleDualGaugeDifferentialAbsoluteSuperSmallOutline
7、Package(MPXHZ6130ASeries)MPXHZ6130A6URail1317••MPXHZ6130AMPXHZ6130AC6URail1317A••MPXHZ6130ASUPERSMALLOUTLINEPACKAGESMPXHZ6130A6UMPXHZ6130AC6UCASE1317CASE1317A©2006-2010,2012FreescaleSemiconductor,Inc.Allrightsreserved.PressureOperatingCharacteristicsTable1.Ope
8、ratingCharacteristics(VS=5.0Vdc,TA=25°Cunlessotherwisenoted,P1>P2.CharacteristicSymbolMinTypMaxUnitPressureRangePOP15—130kPaSupplyVoltage(1)VS4.755.05.25VdcSupplyCurrentIo—6.010mAd
