Michaelquirk半导体制造技术附录图解读.ppt

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1、SemiconductorManufacturingTechnologyMichaelQuirk&JulianSerda©October2001byPrenticeHallAppendixAChemicalsandSafetyDefinitionsofSafetyTermsHazardous:Anychemicalorsubstancethathasadverseeffectsonthehealthorsafetyofpeople.Toxic:Anychemicalorsubstancethatseriouslydamagesbiologicaltissue.Exam

2、plesarephosphineandarsine.Flammable:Anyliquidorgasthatiscapableofignitingintofire.Pyrophoric:Anymaterialthatignitesspontaneouslyinairbelow55C(130F).Anexampleissilane.ExamplesofHazardsinSemiconductorManufacturingProcesschemicalsHighlyflammablegasesPyrophoricgasesCorrosivegasesToxicorca

3、usticliquidsHighvoltagesSolventsMechanicalhazardsHightemperaturesRadiationUVLaserX-rayFreezingtemperaturesHazardWarningSignFigureA.1332WRedWhiteYellowBlueHealthHazard0Normal,nohazard1Slighthazard2Hazardous3Extremelyhazardous4DeadlyFireHazard0Nonflammable1Above200ºF2Below200ºF3Below100ºF

4、4Below73ºFReactivity0Stable,nonreactive1Unstableifheated2Violentlyreactive3Maydetonatewithheatorshock4MaydetonateSpecificHazardOXYOxidizerACIAcidALKAlkaliCORCorrosiveWUsenowaterRadiationhazardDefinitionsofExposureLimits(Refertop.602fordetails)TLV-TWA:Thresholdlimitvalues–timeweightedave

5、rage.TLV-STEL:Thresholdlimitvalues–shorttermexposurelimit.IDLH:Immediatelydangeroustolifeandhealth.PEL:Permissibleexposurelimit.HowChemicalsEntertheBody1.Contactwithskinoreyes.Wearsafetyglassesandnocontactlens.Usegogglestoprotectnormaleyewear.Weartheappropriateglovetypeforthejob.Chemica

6、lsabsorbedthroughtheporesoftheskincanenterthebodyandcausedamagetovitalorgans.Usefullfaceshieldwhenpouringormixingchemicals.HowChemicalsEntertheBody2.Ingestion(swallowing).Certaintoxicchemicalscanbefatalwhenevenaminuteamountiningested.Neverbringfoodordrinkintoareaswherechemicalsarebeingu

7、sed.Itisgoodpracticetowashhandswithsoapandwaterwhenleavingtheworkplace.HowChemicalsEntertheBody3.Inhalation.Breathingtoxicgasesmayresultinburnsordamagetolungtissueandcanpassintothebloodstream,damagingotherorgans.Theworkplacemustbewell-ventilated.Ifunusualodorsaredetected,notify