掺杂ZnO薄膜的生长及其储锂性能研究.pdf

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1、掺杂Zno薄膜的生长及其储铿性能研究作者:徐浩导师:陆防教授复旦大学物理学系2011年5月20日日录目录摘要.........................................................................................……1Abstract.....................................................................................……2第一章绪论…，.

2、.........................................................................……41.1zno晶体概括...................................................·················……1.1.IAI掺杂zno.............……，.…，.，..................·..···············……1.1.2VI族元素掺杂的Zn0.......

3、............................................……51.2铿离子电池概述............................................……，..............……51.2.1铿离子电池的发展历史................……，.........................……51.2.2铿离子电池的工作原理................................................……71

4、.2.3铿离子电池的电极材料................................................……81.2.3.1负极材料............................·····························……81.2.3.2正极材料.…，...……，........................·················……101.3本论文的研究内容和意义.，.................................

5、.................……n参考文献.......................................................……，...............……11第二章样品制备及测试手段.............……，....................................……172.1脉冲激光沉积(PulsedLaserDePosition)技术..............................……172.1.1脉冲激光沉积制备

6、薄膜的基本原理...............................……172.1.2实验装置示意图.......................................................……182.1.3脉冲激光沉积技术的特点...................……，.................……192.2磁控溅射(MagnetronSPutering)镀膜技术................................……202.2.1溅射理论、、

7、................................................·····.········……02.2.2辉光放电................................................················……212.2.3磁控溅射镀膜..........................................................……232.3薄膜的物性表征及测试................……，...

8、............................……242.3.1质量测定—数字式微量天平.....................................……242.3.2薄膜的厚度测定—探针式表面轮廓仪.........................……242.3.3电学性能的测试—霍尔仪........................................……252.3.4X射线衍射(XRD)...................................