梅耶博格262工艺说明(cn).pdf

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1、最先进的精确切割技术加工手册DS262/C型线锯083133-ch-00DS262-MEYER+BURGERLtd梅耶博格有限公司电话++41(0)334390505传真++41(0)334390510电子邮件sales@meyerburger.ch公司主页www.meyerburger.ch2083133-ch-00目录1基本操作知识............................................51.1推荐浆液...............................................51.1.1载液.....................

2、..............................61.1.2研磨砂.................................................61.1.3储存和装卸..............................................81.1.4制备...................................................81.2质量问题与断线分析.....................................121.2.1断线..................................

3、................121.3过程控制..............................................131.3.1常规操作步骤...........................................131.3.2首次质量检查...........................................141.3.3产量分析..............................................152拌浆..................................................17

4、3晶锭粘合..............................................193.1夹持导轨的安装.........................................193.2玻璃切割垫块的切割.....................................203.3玻璃切割垫块的粘合.....................................213.3.1准备切割垫块和工件夹具..................................213.3.2准备粘结剂...........................

5、..................223.3.3玻璃切割垫块的粘合.....................................22083133-cn-003DS262-目录3.4晶锭粘合...............................................233.4.1准备切割垫块和晶锭......................................233.4.2准备粘结剂.............................................233.4.3粘合晶锭...........................

6、....................244更换主辊...............................................255绕线..................................................376晶锭加载...............................................497切割..................................................538晶锭卸载...............................................579晶片

7、的手工清洗.........................................654083133-cn-001.基本操作知识1.1推荐浆液推荐浆液：SiCF500和PEG300乙二醇和碳化硅的比重为：ρ3PEG300=1.125kg/dmρ3SiC=3.178kg/dm083133-cn-005DS262-基本操作知识1.1.1载液属性单位规范pH(10%)-5.0-8.020°C下粘度mPas86-100水份残余K.