基于PDMS的经济型微流体加工技术研究.pdf

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1、机E,-与液压Dec．2014HydromechatronicsEngineeringV01．42No．24DOI：10．3969／j．issn．1001—3881．2014．24．017Eecomnonu"cadlmrmicroflnumidi,corocessi‘natechnologybassedonP]DYa—yaZHANG，Jian—guoCUISchoolofPharmacy&Bioengineering，ChongqingUniversityQ厂Technology，Chongqing400054，ChinaAbstract：Asakindofcommon

2、polymericmaterials，polydimethylsiloxane(PDMS)hasbecomewidelyusedinmicrofluidicchips．Inthispaper，asetoffabricationprocessofthemicrofluidicchipsispresentedwhichdoesn’tneedclean-rooms，bycomparingwiththeconventionalmi—crofluidicprocessingtechnology．ItincludesthefabricationofPDMSmicrochannels

3、tructure，thetreatmentofsudacewettability，andthemultilayerbondingtechnologyanditsapplicationThise—conomicalprocessingtechnologyissuitableforthemostcommonlaboratory．Keywords：PDMS，Projectorlithography，Microwavemodificationsurface，Self—alignment，Plug-gabletechnology．It’sthekeypointofnlicroto

4、talanalysis1．Introductionsystemsincurrentdevelopment，sincemicrofluidicchipsplaygreatapplicationvalueintheseareasMicrofluidictechnologycanbecontrolled，oper—[4-5]．Inordertofabricatemicropipelinenetworkatedandtestedinmicroscopicdimensions．whichisstructureinmicrofluidicchips，theprocessingtec

5、h—anemerginginterdisciplinarybasedonmicroelectron—nologyplaysaveryimportantrole．ics，micromechanieal，bioengineeringandmicro—Formicrofluidicchipprocessingtechnologynanotechnology[1]．Lastdecade，thedevelopmentbasedonPDMS，themoreclassicalmethodismask—ofmicrofluidictechnologywasveryrapidly，bro

6、ughtabasedlithography，buttheprocessingofmaskre—dramaticchangeinthefieldofmedicine，chemistryquireshighercost，longertime—consuming，andmoreandlifesciences，andsomeofthecompanywastoni—expensivelithographymachinesandspecialmachin—mittedtoindustrializemicrofluidictechnology2]．ery，whicharedificu

7、lttomeettheneedsofrapidTheequipmentrelatedtomierosystemincludingmi—processing．Therefore，thismethodcannotbecarriedcropump，microvalve，inicromixer，microfiher，andoutinanordinarylaboratory[6]．Inthispaper，nlicrosplitter，etc[3]．Microfluidicchipisanim—currentnovelandrelativelyfas