集成电路是怎么被制造出来的(精品).doc

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1、集成电路是怎么被制造出来的CPU处理器是怎么做出来的虽然这一组图片很明白的是Intel为自家的Corei7打的广告（「我们在这里以Intel®Corei7为例」），但仍然是了解现代处理器制作丁艺的一个好方法。下图是第一组图，由沙到单晶硅的过程。SandWithabout25M(mass)Sttcon-afterOxygen•thesecondmostfrequentchemicaldementintheearth'scrustSand・especiallyQuartz・hashighpercentagesofSHkonintheformofSilko

2、ndtonde(SiO?)andisthebaseingredientforsemiconductormanufacturingnemauBcon-scale:waferlevel/1?inch)Siliconbpurifiedinmuttipiestepstofinallyreachsemkonducta(naftufacturtngqualitywhkhiscaledSectronkGradeSAcoaElectronicGradeSiliconmayortyhaveoneafeenatomeveryonebillionSiliconatoms.

3、UithispictureyoucanseehowonebigcrystalisgrownfromthepurlftedsiikonmeltTheresultingmonocrystaliscalledIngotMon^crysolSBconIngot-waferlevel(*30Qwn/12inch)AningothasbeenproducedfromQectronkGradeSHkon.Oneingotweightsabout100kilograms(«220pounds)andhasaSiliconpurityof909999%.普通的沙子约有

4、25%的硅，是地壳屮仅次于氧的最常见元素，主要以二氧化硅的形态存在。这些硅经过多个步骤纯化后，达到足以制成芯片的质量一每十亿个硅原子中,仅能出现一个别种的原子。彊后这些高纯度的硅原子结晶成一颗巨大的单晶硅（直径旷12吋），重可达100kg!IngotSOdng-scoterwaferlevel(・300mm1X2inch)TheIngotiscutIntoindMdualsSoondiscssitedwafers.Wafer-state:waferlevel(-300mm/12ioc/>)Thewafersarepolisheduntitheyhav

5、eftawiess*mina-smoothsurfaces.Intelbuysthosemanufacturingreadywafersfromthirdpartycompanies.Intershighiyadvanced45nmHigh-K/MetalGateprocessuseswaferswithadiameterof300mWimeter{*12inches).WhenIntelfirstbeganmakingchips,thecompanyprintedcircuitson2-inch(50mm)wafers.Nowthecompanyu

6、ses300mmwafers;resuttingindecreasedcostsperchip.接下來，单晶硅块被横向切成一片片薄薄的薄片，每一片就是一片「晶圆」。这些晶圆经过抛光后，就形成了制造芯片的原料。最早期的晶圆因为技术的关系，直径大约只有两寸，而今天最先进的晶圆厂则已经可以处理12寸的晶圆了。晶圆直径越大，切割时浪费的部份就越少，而且每一颗芯片的单价越低。ApplyingPfwtoResist-scale,waferlevel(^300tnm/inch)Thelkx>d(bluehere)thatspouredontothewaferwhi

7、ehspinst$aphotoresistfinishsimtorastheoneknownfromfilmphotography.Thewaferspinsduringthissteptoalowverythinandevenappfccationofthisphotoresistlayer.Thephotoresistfinishisexposedtoultraviolet(UV)lightThechemicaireactiontriggeredbythatprocessstepkuniiartowhathappenstofilmmatenali

8、nafWncamerathemomentyoupresstheshutterbutton.Thephotor