新型霍尔效应传感器实现360°旋转位置传感_工控商务网

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1、新型霍尔效应传感器实现360。旋转位置传感_工控商务网Newtypeofhalleffectsensorstoachieve360°rotatingpositionsensingindustrialcommerceBefilteredadvertising

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17、showdynamicjournalmagazineCurrentlocation:home>>industryinformation>>technologyabstract>>Detailedinformationaboutthenewhalleffectsensorstoachieve360°ro

18、tatingpositionsensor2007-01-23:thewesternindustrialcontrolnetwork:120newhallsensorscapableofsinglepointinductionfluxallthreecomponents・VINCENTm.HILIGSMANN,MELEXISMICROELECTRONICSYSTEMSIncreasedonthehalleffectsensorintegratedmagneticconcentrator(IMC)canachievehighprecisio

19、nof360°Rotatingpositionsensing・Thethree-axishalltechniquecombinestheintegratedmagneticconcentratorandthehigh-precision,non-contacthigh-cost,lowcostcost-effectivesmallrotatingpositionsensor・MelexisMLX90316Isthefirstthreeaxisseriesproducts,aimedtosolvetheproblemlongplagued

20、360°positionsensor.TheworkingprincipleofNormallevel(flat)hallsensorscanonlysensemagneticfluxperpendiculartotheICsurface・Thethree-axishallsensorscandetectallthreecomponentsofamagneticflux・Itsrealizationmethodaretwocrossonplaneholecenterlocationtoplacea200micronsindiameter

21、,25micronsthickIMC,sensingeffectishall(figure1a).>figure1.Threeaxishallsensors(A)thetopviewshowstheIMC(yellow)peaceface(blue)・Acrosssection(B)inthedirectionofthethree-axissensorshowstheIMCpeacefaceandmagneticlines.IMCisanon-crystallinematerial,whichisformedbythedepositio

22、nofphotolithographyandetchingtechnology.IMCwillbeparalleltothechipsurfaceflux(B//)isconvertedintoaquadr