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1、SEMIS12-0298N/A©SEMI1998GUIDELINESFOREQUIPMENTDECONTAMINATION1Purpose4.2Theseguidelinesarenotintendedtosupersedeapplicableinternational,governmental,site,ororiginal1.1Thisdocumentestablishesguidelinesfordecon-equipmentmanufacturerrequirements.taminatingequipmentwhichhasbeenexposedtohaz-ar
2、dousmaterialsandwhichisintendedforfurther5Terminologyproductiveuse.Equipmentintendedforfurtherpro-ductiveusemayinclude,butisnotlimitedto,that5.1decontaminationÑTheremovalofmaterialsinorbeingofferedforreuse,resale,repair,refurbishment,onequipment.orrelocation.5.2equipmentÑProcesstools,chem
3、ical(liquidor1.2Theseguidelinesshouldbeadaptedateachsitegas)controlsanddeliverysystems,ancillarysupportwithproperconsiderationgiventolocal,state,systems,structures,piping,ductwork,parts,andsubas-national,andinternationalregulationsandorganiza-semblies(e.g.,vacuumpumps,pumppackages,efßu-ti
4、onpolicies.ent/exhausttreatmentsystems).5.3hazardousmaterialÑAnychemical,substance,2ScopeorcompoundwhichisdeÞnedorinterpretedtopose2.1Theseguidelinesapplytothepreparationforrisksorhazardstohumanhealthortheenvironmentbytransferorrelocationofequipmentwhichhasbeenapplicableinternational,nati
5、onal,regional,orlocalexposedtohazardousortoxicmaterialsandmayposelawsorregulations.athreattohumanhealthortheenvironment.These5.4healthhazardÑAchemicalforwhichthereissta-activitiesmayinclude,butarenotlimitedto,shut-tisticallysigniÞcantevidencebasedonatleastonedown,dismantling,removing,labe
6、ling,andpackagingstudyconductedinaccordancewithestablishedscien-priortotransport.tiÞcprinciplesthatacuteorchronichealtheffectsmay2.2Theseguidelinesdescribeminimumrequirementsoccurinexposedpersons.HealthhazardsincludefordocumentationofdecontaminationandnotiÞcationchemicalswhicharecarcinoge
7、ns,toxicorhighlytoxicofresidualhazardsassociatedwithdecontamination.materials,reproductivetoxins,irritants,corrosives,sensitizers,hepatotoxins,neurotoxins,agentswhich2.3Thelevelofdecontaminationrequiredforequip-actonthehematopoieticsystem,andagentswhichmentdesignate
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