SEMI E30.3-0698 TESTING EQUIPMENT SPECIFIC EQUIPMENT MODEL

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1、SEMIE30.3-0698N/A©SEMI1998TESTINGEQUIPMENTSPECIFICEQUIPMENTMODEL(TSEM)CONTENTS8.4.8DiagnosticReport1Purpose9ProcessProgramManagement2Scope9.1ProcessProgramRequirements3Limitations9.2ProcessProgramStructure3.1Communications9.3MethodsofProcessProgramCreation3.2Multi-HeadandMulti-SiteTSE

2、MImplementa-9.3.1Off-LineDevelopmenttions9.3.2On-LineDevelopment4ReferencedDocuments10RemoteCommands4.1SEMIStandards10.1Requirements5Terminology10.2RemoteCommandDescriptions6Requirements10.3AssociatedRemoteCommandParameters6.1StateModels10.4RemoteCommandsandTSEMProcessModel6.2StateMod

3、elRequirementsMapping6.3TSEMProcessStateModel11Scenarios6.4DescriptionofTesterProcessingStates11.1NormalRunScenario6.5TSEMProcessingStateTransitionsTable11.2RunDiagnostics/CalibrationScenario6.6ProcessModelConditionsTable12AdditionalSEMIE30Requirements7CollectionEventList12.1Requireme

4、nts7.1Requirements13TSEMUniqueCapabilities7.2CollectionEventTables13.1TestHandlingEquipmentCommonData8VariableItems13.2VariableItemRequirements8.1Requirements13.3CollectionEventDataItemRequirements8.2DataTypes13.1HostAccesstoTesterDataLogInformation8.3VariableItemTableRelatedInformati

5、on18.4TSEMRequiredReportsR1-1TSEMARAMSSub-StateCodes8.4.1SetupReportR1-1.1MappingofTSEMProcessingStateModeltoARAMSStateModel8.4.2LotCompleteReportR1-1.2ARAMSStateMappingtoTSEMProcessing8.4.3SubLotCompleteReportStates8.4.4Bin-DataReportListofFigures8.4.5ProcessReportFigure1TSEMProcessi

6、ngStateModel8.4.6Lot/SubLotReport8.4.7CalibrationReport1SEMIE30.3-0698©SEMI1998ListofTablesTable1ProcessingStateTransitionsTableTable2ProcessResumeConditionsTable3ProcessingStateTransitionsRequiringReportLevelsTable4OtherRequiredCollectionEventsTable5VariableItemTableTable6SetupVariab

7、lesTable7LotCompleteVariablesTable8SubLotCompleteVariablesTable9Bin-DataVariablesTable10ProcessVariablesTable11Lot/SubLotStartVariablesTable12CalibrationVariablesTable13DiagnosticVariablesTable14RemoteCommandDescriptionsTable15RemoteCommandsvs.ProcessStatesTable16RemoteCommandsvs.Proc

8、essSt