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1、SEMIF22-0697A©SEMI1997GUIDEFORGASDISTRIBUTIONSYSTEMS1Purpose5.2TerminologyThisreferencedocumentisintendedtooutlineforthe5.2.1air-operatedvalves(AOV)ÑArethosewhichuserthecommonsystemsconÞgurations,components,requirepneumaticenergytoinitiateorterminateflowandsubcom
2、ponentsofhighpuritygasdistributionsys-ortochangeflowpath(e.g.,normallyclosed,partiallytemsinasemiconductorfabricationfacility.Relatedopen,doubleacting).speciÞcationsarealsonoted.5.2.2automaticshutoffvalve(ASO)ÑAmechani-cally,electrically,orpneumaticallyactivatedv
3、alve2Scopewhichhasthesolepurposeofterminatingflowifa2.1Outlinedinthisdocumentarebothbulkandspe-predeterminedconditionisexceeded.Forcryogeniccialtygasdistributionsystems.supplysystems,ASO'sareusedinconjunctionwithalowtemperaturesensingdevice.2.2Componentsandsubcom
4、ponentsareidentiÞedfromthepoint-of-supplytothepoint-of-connectionto5.2.3checkvalveÑAmechanicalgassystemcompo-theprocesstool.nentwhichpreventsreverseflow.5.2.4efßuenttreatmentsystemÑAdevicewhich,3Limitationsthroughmechanical,chemical,cryogenic,absorbent,3.1Thegasd
5、istributionsystemconÞgurationsnotedorothermeans,abateshazardousgaseffluentto"envi-inthisreferencedocumentareprovidedsolelyasaronmentallysafelevels"throughdilution,neutraliza-guidetoindicatecommonindustrypractice.Theyaretion,entrapment,ordistillation.notpresenteda
6、s,orintendedtobe,arepresentationofbestengineeringpractice.5.2.5excessßowdeviceÑAmechanicalorelectricalcomponentwhichsensesandsignalsanAOVoritself3.2Thereferencedocumentsnotedareprovidedfortoterminateflowintheeventpredeterminedflowisgeneralguidanceonlyandarenotint
7、endedtoportrayaexceeded.codecomplianceprotocol.TheusersshouldalwaysconsultlocalauthoritiestodeterminespeciÞcapplica-5.2.6facesealÞttingÑAhighpurityfittingwhichblecodesandregulations.Agencies,regulatoryoroth-incorporatestwomachinedfacesandametallicgasketerwise,not
8、edhereinarerepresentativeonlyoftheU.S.withinamale/femalenutconfigurationtoattainahighleakintegrityseal.3.3SpeciÞcations,SEMIStandardsorother,arenotedtoassistth
