资源描述：
《SEMI F21-95 CLASSIFICATION OF AIRBORNE MOLECULAR CONTAMINANT》由会员上传分享，免费在线阅读，更多相关内容在行业资料-天天文库。
1、SEMIF21-95N/A©SEMI1995,1996CLASSIFICATIONOFAIRBORNEMOLECULARCONTAMINANTLEVELSINCLEANENVIRONMENTS1Purpose5.2Eachcategoryisdesignatedbytheletter"M,"fol-lowedbythefirstletterofthecategorynameA,B,C,Thepurposeofthisstandardistoclassifymicroelec-orD.tronicscleanenvironmentswi
2、threspecttotheirmolec-ular(non-particulate)contaminantlevels.This5.3Theintegerfollowingthecategorydesignatorstandardclassificationprovidesaconsistentmeansofshallindicatethemaximumtotalgasphaseconcentra-communicatingacceptablecontaminantlevelsoftioninpartspertrillionmola
3、r(pptm1´10-12).Forgroupsofspecificairbornemolecularcontaminants.example,acategoryM?-10hasamaximumallowableSeeRelatedInformation1appendedtothisstandard.totalconcentrationof10partspertrillionmolarforthecategoryofinterest.2Scope6ClassiÞcationThisstandardclassificationistobe
4、usedinthespecifi-cationofsemiconductorcleanenvironments(includingprocesstoolenvironments)andofcontaminationcon-MaterialCategory1*10*100*1000*10,000*trolandmeasurementequipmentperformance.AcidsMA-1MA-10MA-100MA-1000MA-10,0003ReferencedDocumentsBasesMB-1MB-10MB-100MB-1000
5、MB-10,000None.CondensablesMC-1MC-10MC-100MC-1000MC-10,000DopantsMD-1MD-10MD-100MD-1000MD-10,0004Terminology4.1acid—Acorrosivematerialwhosechemical*Concentration,inpartspertrillionreactioncharacteristicisthatofanelectronacceptor.7ReferenceTestMethods4.2base—Acorrosivema
6、terialwhosechemicalAnalyticalmethodscapableofmeasuringtheclassifiedreactioncharacteristicisthatofanelectrondonor.levelsattheagreedlevelofconfidenceshallbeused.4.3condensable—Asubstance(otherthanwater),typicallyhavingaboilingpointaboveroomtempera-8RelatedDocumentstureatat
7、mosphericpressure,capableofcondensation8.1SEMIDraftDoc.2237,"TestMethodfortheonacleansurface.DeterminationofInorganicContaminationfromMini-4.4dopant—Achemicalelementwhichmodifiestheenvironments,"1/18/94.electricalpropertiesofasemiconductivematerial.8.2SEMIDraftDoc.2238
8、,"TestMethodfortheDeterminationofOrganicContaminationfromMini-5BasisofClassiÞcationenvironments,"1/18/94.Classificatio
