微光机电加速度计的研究现状及发展

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1、MEMS鸟传感器MEMSandSensorsResearchandDevelopmentStatusofMOEMSAccelerometersFengLishuang,ChiYuanyuan,ZhouZhen,YaoBaoyin(KeyLaboratoryofMicro-NanoMeasurement-ManipulationandPhysicsoftheMinistryofEducation9SchoolofInstrumentationScienceandOpto-ElectronicsEnginee

2、ring9BeihangUniversity9Beijing100191»China)Abstract：Theprincipleandstructuralcharacteristicsofmicro-opticalelectronicmechanicalsystem(MOEMS)accelerometersattractinggreatattentionareanalyzed>andtheclassificationanddevelopmenttrendofMOEMSaccelerometersares

3、ummarized.Accordingtomicro-nanogratingaccelerometers♦theprinciplesandstructuresofmicro-gratingaccelerometersbasedoninterfe*renceeffectandnano-gratingaccelerometersbasedoneffectiverefractiveindexchangeforsubwavelengthstructureareanalyzed.Theresultsshowtha

4、ttheprecisionofthoseaccelerometerscanreachngorderandbeappliedinseismicmonitoringsuccessfully.Thestructureandperformanceofnewopticalwaveguideaccelerometersbasedonpolymersareanalyzedemphatically.Themicroringresonatoraccelerometerhastheadvantagesofthehighme

5、asurementprecisionandtailoredpropertiestbutthelongtermstabilityistheprimalproblemtorestrictitsapplication.Theaccelerationmeasurementbyatomsthroughthelightforceaccelerometerovercomestheshortcomingofpoorlongtermstabilityandhasaveryhighprecision.Thetechnic

6、alfeaturesandmainindexesoftheseaccelerometersarecomparedtandthedevelopmentdirectionandapplicationprospectofMOEMSaccelerometersintheinertialfieldarealsodiscussedpreliminarily.Keywords：MOEMSaccelerometer；micro-nanogratingaccelerometer；immunitytoelectromagn

7、eticinterference；highprecision；inertialfieldCLCnumber：TH703Documentcode：AArticleID：1671-4776(2011)09-0583-08DOI：1().3969/j.issn.1671-4776.2011.09.008EEACC：2575微光机电加速度计的研究现状及发展冯丽爽，迟媛媛，周震，姚保寅(北京航空航天大学仪器科学与光电工程学院微纳测控与低维物理教育部重点实验室，北京100191)摘要：对目前正成为研究热点的微光机电(

8、MOEMS)加速度计的原理和结构特点进行分析，总结了MOEMS加速度计的分类和发展趋势。针对微■纳光栅加速度计，分析了基于干涉效应的微米光栅加速度计和基干亚波长结构有效折射率变化的纳米光栅加速度计的结构和原理，其精度可达ng,并成功应用到地震监测中。重点分析了基于聚合物的新型光波导加速度计的结构和性Receiveddate：2011-05-06Correspondingauthor：ChiYuanyuan,E-mail:chi