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1、TheMicroPIVsystemmeasuresthedistributionofthe3DvelocitydistributionofthesquaremicroflowKingxuofzhengxuBeijing,Beijing,100080*lili@imech.ac.cnAbstract:thispaperintroducesaMicroPIVsystemwithverticalfine~tunedfunction.WiththecoordinationofPInanometerdisplacementcontroller,thev
2、erticaldisplacementadjustmentaccuracycanreachlOnm・Onthesquareflowchannel55mumx20micronsofthevelocitydistributionatdifferentverticallocationofthemeasurementresultsshowthatdimensionlessvelocitydistributionexperimentagreewe11withthree-dimensionaltheorypredicts,dimensionlessmax
3、imumspeedverticaldirectionatthesametimeisalsoconsistentwiththeoreticalresults・3Dcharacteristicsofthevelocityprofileofamicrotubewithadepthratiooflessthan3.Keywords:MicroPIV,microflow,squaref1ow,velocitydistribution1.TheintroductionMicroflowisanimportantcontentinthestudyofMEM
4、Ssystem,thestudyofmicroflowmechanismbecometheimportantbasisforthedevelopmentofMEMSfield,Ho&Tai[1]haveacomprehensivereview・TheMicroPIVtechnology,pioneeredbySantiagoelal.⑵andMeinharletal.[3],providesanimportantmeansformeasuringandmovingdatainmicroflows・Inrecentyears,MicroPIVt
5、echnologymaturegraduallyandhassuccessfullybeenappliedtothemeasurementofmicroflow[4],.5],buttherearemanyproblemsneedtobeimproved,suchastofurtherimprovethespatialresolution,thenearwallareaandtoimproveaccuracy,etc・Thisarticleintroducesthehighmagnificationandhighnumericalapertu
6、reobjective,nanometerdisplacementcontrolsystemformedMicroPIVsystem,thesystemofopticalresolutionof0.35microns,imageresolutionupto80nm,verticalpositionaccuracyupto10nm.Existingmicrofluidicchipsaremostlysquare・Squaregrooveismadewhenthewidthisgreaterthantheheightoftheshape,posi
7、tioninthecenterofthewidthofthemeasuredalongtheheightdirectionofthevelocitydistributionandPoiseuilleflowtwo-dimensionalparabolicdistributionapproximation[4_AndonthebasisofWhite[6]giventhetheoreticalsolutionoftheviscousflowofsquaretube,theheightandwidthweresmallsquaretube,3de
8、ffectwillbeveryobvious,twodimensionalPoiseuilleflowparabolasolutionwillnolongerapp
