Effect of microwave power and C2 emission intensity on structural and surface

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1、EffectofmicrowavepowerandC2emissionintensityonstructuralandsurfacepropertiesofnanocrystallinediamondfilms微波功率和C2发射强度对纳米金刚石薄膜的结构的和表面性质的影响abstract摘要Nanocrystallinediamond(NCD)filmsaresynthesizedusingmicrowaveplasmaenhancedchemicalvapourdepositiontechniqueat2×104Paand600°Cwithmicrowavepowerof600–160

2、0W.Depositioniscarriedoutonn-type(100)siliconwaferwithAr/H2/CH4gasmixtures.ThefilmpropertiesareanalyzedusingmicroRamanspectroscopy,Fouriertransforminfrared(FTIR)spectroscopy,X-raydiffraction(XRD),scanningelectronmicroscopyandatomicforcemicroscopy.Ramanspectrashowtwopredominantpeakscenteredaround1

3、335cm−1and1560cm−1andtwohumpsaround1160cm−1and1450cm−1,respectively.FTIRspectrashowC:Hstretchingmodesaround3000cm−1.XRDpatternsshowapeakat44°(2θ).InsitudiagnosticofplasmaiscarriedoutusingOpticalEmissionSpectroscopy.IthasbeenobservedthatC2dimerplaysanimportantroleinthenucleationofdiamondcrystalsdu

4、ringNCDfilmdepositionandtheemissionintensityofC2canbeadjustedbyvaryingthemicrowavepower.Ithasalsobeenobservedthatthestructuralpropertieslikegrowthrate,surfacemorphologyandgrainsizeofthegrowingfilmaredependentontheC2intensityduringdeposition.利用微波等离子体增强的化学气相沉积技术在2×104Pa和600°C与微波功率600-1600W合成了纳米金刚石（

5、NCD）薄膜。用氩气，氢气和甲烷的混合气体对n型（100）硅晶片进行沉积处理。使用微拉曼光谱仪，傅立叶变换红外光谱仪（FTIR），X射线衍射仪（XRD），扫描电子显微镜和原子力显微镜来分析了薄膜的性质。拉曼光谱分别地显示了两个主峰中心位于约1335cm−1和1560cm−1处，以及两个驼峰在1160cm−1and1450cm−1。傅立叶变换红外光谱表明碳比氢在约3000cm−1的伸长模式。X射线衍射模型表明峰值在44°（2θ）。运用光学的发射光谱仪进行了等离子体的原位诊断。观察到了C2二聚体在纳米晶体金刚石薄膜的沉积阶段对金刚石晶体的成核起了一个重要的作用，以及C2的发射强度是可以通过不

6、同的微波功率来调整的。同时也观察到了在沉积阶段生长的薄膜的结构的性质比如生长速率，表面形态和晶粒大小是依赖于C2二聚体的强度的。Conclusion结论Ramanspectra,SEM,LateralForceimagesandXRDpatternsconfirmtheformationofnanocrystallinediamondfilmsduringdeposition.C2dimerplaysanimportantroleinthenucleationoftheNCDfilms.TheintensityoftheC2emissiondeterminesthegrowthrate,

7、structure,surfacemorphologyandroughnessoftheNCDfilms.TheC2emissionintensitydependsonmicrowavepower.Wethusconcludethatoverallgrowthisthecombinationofnucleation,growthandetchingdrivenbydifferentplasmaspecies.Inthepresent