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1、IEEE/ASMETRANSACTIONSONMECHATRONICS,VOL.18,NO.3,JUNE2013821NonlinearModelingandDecouplingControlofXYMicropositioningStagesWithPiezoelectricActuatorsYangqiuXie,YonghongTan,andRuiliDongAbstract—Inthispaper,amodelingmethodofXYmicroposition-oftheoscillationandun
2、desiredsystemerrorcausedbyhystere-ingstagewithpiezoelectricactuatorsisproposed.Inthemodelingsisinpiezoelectricactuatorsisoneoftheimportantissuesinscheme,asandwichmodelconsistsofbothinputandoutputlin-nanoscalepositioningsystems.In[10],anadaptiveinversecon-ear
3、submodels,andanembeddedneural-network-basedhysteresistrolforhysteresiswasimplemented,whilein[11],theauthorssubmodelisusedtodescribethemotionbehaviorofeachaxisofthestage.Moreover,aneural-network-basedsubmodelisconstructedconsideredthehysteresisasamodeluncerta
4、intyanddevelopedtodescribethenonlinearinteractivedynamicscausedbythemove-arobustadaptivecontrolstrategytohandleit.In[12],aPre-mentofanotheraxis.Then,atrackingcontrolschemecombinedsachinversemodelisconstructedtocompensatefortheeffectwithanonlineardecouplingco
5、ntrolisproposedtocompensateforofhysteresisforpiezoelectricactuators.Inaddition,anadaptivetheeffectoftheinteractionsbetweenaxesandtrackthereferenceslidingcontrolisproposedtocontrolasystemwithpiezoelec-trajectory.Then,therobustdesignmethodforthetrackinganddeco
6、uplingcontrolisdiscussed.Finally,theexperimentalresultstricactuator[13].Moreover,LiandXu[14]proposedamod-onanXYmicropositioningstagearepresented.ifiedPrandtlIshlinskiihysteresismodel-basedcontrolmethodtosuppresstheeffectofhysteresisinthePEAsofamicroposi-Index
7、Terms—Decouplingcontrol,expandedinputspace,hys-teresis,micropositioningstage,neuralnetwork,sandwichsystem.tioningstage.Besides,thegeneralizedPrandtlIshlinskiiinversemodel[15],Dahlinversemodel[5],andaninversemodelbasedonneuralnetworkcooperatedwithalinearautor
8、egressivesub-I.INTRODUCTIONmodelwithexogenousinput[34]are,respectively,employedasthefeedforwardcompensatorstoeliminatetheeffectofhystere-SUALLY,XYmicropositioningstagesareusedinultra-sis,andthen
