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1、GroupMeetingDong-MingFangApril18,2008WorkinthelasttwoweeksCompleted…1Read…2Read…3Read…4Downloaded…5Conceiving…6WorkinthelasttwoweeksCompletedPPTfilefororalspeechInEnglishProperContentsAbout35PagesWorkinthelasttwoweeksThesisdraftwrittenby…Design…1.Fabrication…2.Measured…3.WorkinthelasttwoweeksP
2、rocessesInformationStoragePECVD:SiO2,Si3N4,SiCSputter:Ti,Au,Pt,Al,Cr,W,PbLPCVD:PolySi,SiO2,Si3N4SiOxidation:HO,O2,H2OMembraneIonInjection:As+,P+,B+,BF2+Diffusion:P+,B+AdjustingICP:Si,Ti/Al,Cr/Cu,Cr/Pt,Ti/Pt/Au,Pyrex,SiO2RIE:Si,SiO2,Si3N4,SiO2,Solutions:KOH,BHF,HF,H3PO4EtchingAnode(electrostati
3、c),Au-Si,hotBondingWorkinthelasttwoweeks1.SiliconMicrofabrication:…..2.MEMSReliability:…..3.NSFCRequisition:….4.Other:PublishedpapersofIMEReferencesandPPTfilesWorkinthelasttwoweeksSafetyandOperationHandbookSafetyExit,Fireextinguisher,Showerequipment,EyebathsystemMSDSHealthhazard,Firehazard,Spe
4、cifichazard,ReactivityEtchingRoom600m2，Etchingplatform,Shelf,ReagentchemicalsFutureworkinthenextweekSimulate….Read…Learn…WorkinthelastweekPassedthe…1Readreferences…2Simulatedandanalyzed…3Designthefabrication…4WorkinthelastweekTuninglinearityOutputpowerFrequencypullingTuningsensitivityFrequency
5、rangeHarmonicrejectionFrequencypushingThemainperformancefigures….Workinthelastmonth2.学习….仿真1.查阅文献4.进实验室….3.…工艺制作流程Workinthelastmonth实验相关曝光显影电镀甩胶烘胶正胶AZP4903Workinthelastmonth2008.4.22用…2008.4.25….大概15umWorkinthelasttwoweeks电镀……项目申请…申请的准备3….会议投稿124Workinthelasttwoweeks稀释HF溶液HF0.4mol/L，腐蚀速率：室温100
6、nm/s，32度时200nm/sHF2.6mol/LHNO32.2mol/L32度时300nm/sTi湿法腐蚀50:1:1H2O:HF:HNO320:1:1H2O:HF:H2O21:1:20HF:H2O2:HNO3WorkinthelasttwoweeksI20.09mol/LKI0.6mol/L腐蚀速率：室温8-15nm/sAu湿法腐蚀1:2:10I2:KI:H2O25g：7g：100mlBr2:KI:H2O1:2:3HF:HAc:HNO3Workinthelasttwoweeks国家基金对项目的要求越来越高基础性前瞻性战略性强调原创性提高交叉项目的强度和比例强调学科交叉Work
7、inthelasttwoweeks研究实力写作技巧创新思想一新遮百丑基金有多种手段保护创新思想以往的研究积累和研究水平准确、清晰、具体、可行的研究计划申请基金的三要素Workinthelasttwoweeks申请书的核心问题创新性重要性实用性连续性可行性科学选题做什么（What）-问题的提出为什么（Why）-意义分析怎么做（How）-技术路线立项依据工作积累实验条件人才梯队支持条件Workinthelasttwoweeks立项依据阐述项目对社会或经济的意义1本项目国内
