Stitching Interferometer for large plano optics using a standard interferometer

Stitching Interferometer for large plano optics using a standard interferometer

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时间:2019-07-16

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1、StitchinginterferometerforlargepianoopticsusingastandardinterferometerMichaelBrayCilas,8avenueBuffon,Z.I.Lasource,45063OrleansCédex,France.ABSTRACTThemanufactureofmodernopticalcomponentsoftenrequirestheuseofhighperformanceinterferometers,usuallybasedonphas

2、e-shiftingtechniques.However,thereiscurrentlynocommercialphase-shiftinginterferometerhavingthecapacitytomeasurelargeparts,suchasthosefoundinInertialConfmementFusionLasers(NIFandMégaJoule),andotherlargesystems,withtherequiredhighspatialresolution(tenthsofam

3、illimetre)Inordertocircumventtherestrictionsonthesizeofstandardinterferometers,wehavedesignedandbuiltastitchinginterferometerforlargeplanosurfaces,usingastandardcommercial"small"diameterphase-shiftinginterferometer.Thesystemiscompletelyautomated,usingaPCco

4、mputertoacquireandstitchmeasurementstogethertoproducetheoriginallargesurface.Theadvantagesofthistechniquearelowcost,smallsize,andpreservationofspatialresolution.Also,smallerpropagationdistancemeansbetterhandlingofthesmallerspatialperiods.Onesuchsystemhasbe

5、eninactualuseforthecharacterisationoflargesizemirrors(400x600mm)sinceDecember1994.Inthispaper,weshalllookatthedesignofthesystemandproduce,asanexample,actualmeasurementsperformedonaPHEBUSlaserslabpolishedmorethanadecadeago.Theinterferogramshowsextraordinary

6、(andbeautiful)featuresneverseenbeforeinsuchdetail.Keywords:interferometry,stitchinginterferometry,subaperture,largecomponents,highresolution1.INTRODUCTIONThepresentarticleisintendedtoshow,andexplaininsimpleterms,howthestitchinginterferometerperforms.Thissh

7、allbedonewithoutanycomplicatedequations-itisindeedmuchmoreinterestingtounderstandthingsinabasicmanner,evenifthismeanssimplif'ingthephenomenaalittlebit.Actually,asisoftenthecase,theimplementationisthedifficultpart,notthebasicsWefirstdiscussthestartingpointo

8、fourdevelopment,plussomebasics.Wenextexplaintheimplementationofoursystem,restrictingourselvestothemainfeatures.Thisisfollowedbyachapteronthepracticalsideofthesystem,includingafewindicationsonerrorsources.Weth

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