Multi-aperture Overlap-scanning Technique for Large Aperture Test (1)

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1、Multi-apertureOverlap-scanningTechniqueforLargeApertureTestMing-YiChenWei-MingChengandCun-WuWangLabofAppliedOptic.&Metrology,ShanghaiUniversityofScienceandTechnologhJiading,Shanghai201800ChinaABSTRACTSubaperturetesttechniquedeyelopedbyJ.Wyanteta!.revealedanewappro-achtosolvethepro

2、blenoftestingalargeopticalsurface.Unfortunately,uncertaintyintherelativepistonsandtiltsamongindividualsubaperturesleavesaconsiderablemeasurementerrortothatmethod,whichbecomesanimpedimenttoitspracticalapplications.Aswellknown,twointerferograms,samplefromthesametestedsurfacebydiffer

3、entadjustingofaninterferometer,mustbedifferentingeneral.However,thedifferencebetweentheseinterfero-gramsgivestherightinformationontherelativechangeofpistonandtiltofthereferencewavefrontduringsequentialadjustments.Basedonthatfact,inourlabhasrecentlybeendevelopedtheMulti-apertureOve

4、rlap-scanningTechniqueOIAOST)forlargeapertureopticstest,bywhichalargeopticalsurfaceistestedbyasequenceofscanningsofasmallaperturewithanoverlaparea.Afterprocessingofallsampledinterferogramsbyaspecialdesignedsoftwarethefullapertureofthetestedopticalsurfacewillberegainedprecisely,Int

5、hispapertheprincipleandthemathematicmodelofMAOSTisdescribed,andresultsofapplyingMAOSTtotesttwoopticalflatswithanaperturemagmificationratioupto2.6arealsogiven.1.INTRODUCTIONTotestalargeopticalsystemoneoftenusesanopticalreferenceflatofsimilardimension,Thefabricationandtestingofalarg

6、eopticalflatisadifficult,timeconsumingandcostlyprocess.Inearly'80stherewasaconsiderableinterestsinSubapertureTestingtechniques"2wherethereferenceflatisreplacedbyanarrayofsmalleropticalflats(seeFig.!)viewingthefullaperture.Itisobviousthateachsubapertureprovidesaninterfrogramwhichco

7、ntainsinformationontheaberrationspresentinaportionoftheopticalsystembeingtested.Moreover,eachinterferogramalsocontainscontributionsfromthepistonandtiltofthesubaperture.Sinceitisneitherpossibletoperfectlyalign626/SPIEVol.1553LaserlnterferometryIV:Computer-Aidedlnterferometry(1991)0

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