semiconductor manufacture technology英文学习材料

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1、SemiconductorManufacturingTechnology半导体制造技术Instructor’sManualMichaelQuirkJulianSerdaCopyrightPrenticeHallTableofContents目录I.ChapterOverview1.Semiconductorindustryoverview2.Semiconductormaterials3.Devicetechnologies—ICfamilies4.Siliconandwaferpreparation5.Chemicalsintheindustry6.Contaminati

2、oncontrol7.Processmetrology8.Processgascontrols9.ICfabricationoverview10.Oxidation11.Deposition12.Metallization13.Photoresist14.Exposure15.Develop16.Etch17.Ionimplant18.Polish19.Test20.AssemblyandpackagingII.AnswerstoEnd-of-ChapterReviewQuestionsIII.TestBank(suppliedondiskette)IV.Chapteril

3、lustrations,tables,bulletedlistsandmajortopics(suppliedonCD-ROM)NotestoInstructors:1)Thechapteroverviewprovidesaconcisesummaryofthemaintopicsineachchapter.2)Thecorrectanswerforeachtestbankquestionishighlightedinbold.Testbankquestionsarebasedontheend-of-chapterquestions.Ifastudentstudiesthe

4、end-of-chapterquestions(whicharelinkedtotheitalicizedwordsineachchapter),thentheywillbesuccessfulonthetestbankquestions.2Chapter1IntroductiontotheSemiconductorIndustryDie:管芯defective:有缺陷的DevelopmentofanIndustrySinglecrystalsilicon1.WaferPreparation4.AssemblyandPackaging:includescrystalThew

5、aferiscutScribelinegrowing,rounding,alongscribelinesslicingandpolishing.Wafersslicedfromingottoseparateeachdie.Asingledie2.WaferFabricationMetalconnectionsAssemblyPackagingincludescleaning,aremadeandthelayering,patterning,chipisencapsulated.etchinganddoping.3.Test/SortincludesDefectivedie5

6、.FinalTestensuresICprobing,testingandpasseselectricalandsortingofeachdieonenvironmentalthewafer.testing.•TherootsoftheelectronicindustryarebasedonthevacuumtubeandearlyuseofsiliconforsignaltransmissionpriortoWorldWarII.Thefirstelectroniccomputer,theENIAC,wasdevelopedattheUniversityofPennsyl

7、vaniaduringWorldWarII.•WilliamShockley,JohnBardeenandWalterBrattaininventedthesolid-statetransistoratBellTelephoneLaboratoriesonDecember16,1947.Thesemiconductorindustrygrewrapidlyinthe1950stocommercializethenewtransistortechnology,withmanyearlypioneersworkingi