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1、重庆大学硕士学位论文英文摘要ABSTRACTDuetogoodchemicalstabilityandelectricalresistivity,highthermalconductivityandmechanicalintensity,widebandgapandlowthermalexpansioncoefficient,AlNthinfilmscanbeappliedforinsulatingchipsforsemiconductordeviceswithhighpower,thermaldissipatio
2、nlagersforlargeandsuper-largescaleintegratedcircuits,insulatinglayersorpassivationlayersforsemiconductor.Foritsexcellentopticalproperties,AlNcanbealsousedinultravioletopticalcomponentswithhighpowerforthermalconductivitymaterial.AlNthinfilmwaspreparedfroma99.99
3、9%purealuminumtargetbyDCandAFreactivemagnetronsputteringinnitrogengasmixedwithargongas.Thetransmissionspectrumofsampleshasbeenmeasured.ThetransmissionofAlNfilmsincrease,whentheworkingpressurearises.Distanceoftargetandsubstrategetlongeralsoincreasethetransmissi
4、onofAlNfilms.Asthetemperatureofsubstrategethigher,thetransmissionofAlNfilmsdecreaseslightly.NitrogengasconcentrationandsputteringtimebarelytakeeffectonthetransmissionofAlNfilms.Theoptimalconditioninpreparationprocessionwasalsoproposed.WiththeXRDspectrum,itshow
5、stheAlNthinfilmshaveorientationgrowthwith(002)and(101).ThebreakdownvoltageofAlNthinfilmshavebeenmeasuredby105Cwithstandingvoltagetesterinstrument,meanwhilethethermalconductivityofsampleshasbeenmeasuredbyTC-7000laserinstrumentofYanShanuniversity.wecandrawaconcl
6、usionthat:acertainannealedtemperaturecanincreasethebreakdownvoltage,AlNthinfilmswithoptimalbreakdownvoltageis7.5MV/cm.Inthelastpartofthisthesis,thethermolysisefficiencyofLEDhasbeenstudied.TwopointsinLEDhavebeenchosenfortemperaturemeasurement.Fromthesimulateexp
7、erimentonassembledLED,Followingresulthasbeenobtainedafterthestudyofheatingcurves.TheAlNthinfilmsonLEDintegratedcircuit(IC)boardcanincreasethethermolysisefficiencyofLED.ThehigherthermalconductivityofAlNthinfilmsshowsthatthehigherthermolysisefficiencycanobtained
8、.ThedatacanofferreferenceforAlNthinfilmsapplyinginLEDpacking.Keywords：AlNThinFilms,ThermalConductivity,BreakdownVoltage,TransmittanceOpticalProperty,AssembledLEDII重庆大学硕士学位论文目录目录中文摘
