SBT类钙钛矿结构铁电陶瓷制备与Cu单晶衬底上薄膜沉积探索

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1、SBT类钙钛矿结构铁电陶瓷制各与Cu单品衬底上薄膜沉积探索关键词：类钙钛矿铁电溅射靶材SBT铁电薄膜cu单晶衬底射频磁控溅射法青岛科技人学研究生学位论文PREPARATIONOFSBTPEROVSKITE．LIKECERAMICSANDFERROELECTRICTHINFILMSDEPOSITIONONCuⅥ／AFERSABSTRACTRecently，ferroelectricthinfilmsaswellastheirapplicationsinnon—volatileferroelectricrandomaccessmemory(FRAM)arebecom

2、ingresearchhotpoint．However,ferroelectricfatiguehasbeenthemainfactorpreventingthefurtherdevelopmentandwidelyapplicationsofFRAM．Inordertosolvetheproblem，novelmaterialandwafer,suchasfatigue．freeperovskite—likeSrBi2Ta209(SBT)ferroelectricfilmandcoppersinglecrystalwaferareintroduced．Thep

3、reparationofsputteringtargetsanddepositionwafers，aswellasthepreparationofferroelectricthinfilmsarecomprehensivelyexploredinthispaper．SBTceramicsandsputteringtargetswithdifferentBi203additionsaresynthesizedbysolidstatereaction．TheeffectsofsynthesistechniqueandBi203additiononthestructu

4、reandpropertiesofSBTperovskite—likeceramicsareinvestigated．Withas-preparedSBTtargets，SBTfilmsaredepositedoncoppersinglecrystalwafersbyradiofrequencymagnetronsputtering(RMP)．Subsequently,thedepositedSBTfilmsareannealedatdifferenttemperaturesatpurenitrogen．ThestructureandpropertiesofSB

5、Tthinfilmsareinvestigated．TheexperimentalresultsindicatethattheoptimalquenchedtemperaturesforBiTa04precursorsandSBTpowdersare900℃and950℃．respectivelyinatwo-stageprocessofSBTsynthesis．AfterI000*Csinteringatypicalperovskite·likestructureSBTcanbeidentified．Thedensityofperovskite—likeSBT

6、ceramics，aswellasthedegreeofc·axispreferredorientationandgrainsizewillbeincreasedobviouslywhenraisingthesinteringtemperature．Furthermore，theferroelectricityincreaseswhilethedielectricitydecreasesasthesinteringtemperaturehigher．TheBi203additionalsoinfluencesthemicrostructure，andincrea

7、sesboththedegreeofC-axispreferredSBT类钙钛矿结构铁电陶瓷制备与Cu单品衬底上薄膜沉积探索orientationandgrainsizeofas．resultSBT．ThedielectricityandferroelectricityalsovaryaccompanyingwiththeBi203addition．AnoptimalferroelectricityCanbeobtainedwhentheBi203additionis5m01％．Theperovskite—likeSBTceramictargetswithdif

8、ferentBi203a