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ID:39110255
大小:3.37 MB
页数:93页
时间:2019-06-25
《SBT类钙钛矿结构铁电陶瓷制备与Cu单晶衬底上薄膜沉积探索》由会员上传分享,免费在线阅读,更多相关内容在学术论文-天天文库。
1、SBT类钙钛矿结构铁电陶瓷制各与Cu单品衬底上薄膜沉积探索关键词:类钙钛矿铁电溅射靶材SBT铁电薄膜cu单晶衬底射频磁控溅射法青岛科技人学研究生学位论文PREPARATIONOFSBTPEROVSKITE.LIKECERAMICSANDFERROELECTRICTHINFILMSDEPOSITIONONCuⅥ/AFERSABSTRACTRecently,ferroelectricthinfilmsaswellastheirapplicationsinnon—volatileferroelectricrandomaccessmemory(FRAM)arebecom
2、ingresearchhotpoint.However,ferroelectricfatiguehasbeenthemainfactorpreventingthefurtherdevelopmentandwidelyapplicationsofFRAM.Inordertosolvetheproblem,novelmaterialandwafer,suchasfatigue.freeperovskite—likeSrBi2Ta209(SBT)ferroelectricfilmandcoppersinglecrystalwaferareintroduced.Thep
3、reparationofsputteringtargetsanddepositionwafers,aswellasthepreparationofferroelectricthinfilmsarecomprehensivelyexploredinthispaper.SBTceramicsandsputteringtargetswithdifferentBi203additionsaresynthesizedbysolidstatereaction.TheeffectsofsynthesistechniqueandBi203additiononthestructu
4、reandpropertiesofSBTperovskite—likeceramicsareinvestigated.Withas-preparedSBTtargets,SBTfilmsaredepositedoncoppersinglecrystalwafersbyradiofrequencymagnetronsputtering(RMP).Subsequently,thedepositedSBTfilmsareannealedatdifferenttemperaturesatpurenitrogen.ThestructureandpropertiesofSB
5、Tthinfilmsareinvestigated.TheexperimentalresultsindicatethattheoptimalquenchedtemperaturesforBiTa04precursorsandSBTpowdersare900℃and950℃.respectivelyinatwo-stageprocessofSBTsynthesis.AfterI000*Csinteringatypicalperovskite·likestructureSBTcanbeidentified.Thedensityofperovskite—likeSBT
6、ceramics,aswellasthedegreeofc·axispreferredorientationandgrainsizewillbeincreasedobviouslywhenraisingthesinteringtemperature.Furthermore,theferroelectricityincreaseswhilethedielectricitydecreasesasthesinteringtemperaturehigher.TheBi203additionalsoinfluencesthemicrostructure,andincrea
7、sesboththedegreeofC-axispreferredSBT类钙钛矿结构铁电陶瓷制备与Cu单品衬底上薄膜沉积探索orientationandgrainsizeofas.resultSBT.ThedielectricityandferroelectricityalsovaryaccompanyingwiththeBi203addition.AnoptimalferroelectricityCanbeobtainedwhentheBi203additionis5m01%.Theperovskite—likeSBTceramictargetswithdif
8、ferentBi203a
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