+*JIE*+:-4?9.D+A+*8C"> +*JIE*+:-4?9.D+A+*8C" />
欢迎来到天天文库
浏览记录
ID:37841202
大小:1.21 MB
页数:7页
时间:2019-06-01
《考虑光学邻近效应的详细布线算法》由会员上传分享,免费在线阅读,更多相关内容在行业资料-天天文库。
1、第!"卷!第!期半!导!体!学!报5678!"!(68!!##$年!月%&'()*)+,-.(/0,1*)2'%,(3-%4,.*19:8!!##$"!(*-+4(5$.7*+&,;4,.9+*JA>+*JIE*+:-4?9.D+A+*8C//(:*)".&)*9-+&*U!iEFJKX9N!FJC&6JKYNFJ76JKiE6AZNFJK!%FNhN>N"G$1#*"7$-")+8)716"$*!34$-3$#-/L$39-)2).&!L54-.96#K-4H$*54"&!;$4<4-.!R###"T!894-##;<)*9-:*$X9B<9@9J?FC9?FN79C<
2、6A?NJKF7K66J@NC9F7B<6`NIN?D9LL9>?84E97NKE?NJ?9J@N?DN@>F7>A7F?9C:9L6<9EFJCFJC@?6<9CNJ766[AB?F:79@84E9@9>6@?@F<9A@9CF@F>6J@?6J@??9CL6<>9CN<9>?9C*?9NJ9<99<6A?NJK?69JEFJ>9<6A?NJK9LLN>N9J[>D8)`B93、7?@6JNJCA@?EIF<>N<>AN?@@E6V?EF??E9B<9@9J?9C<6A?NJKF7K6FJ6:?FNJIA>ENIB<6H9I9J?>6J@NC9F79LL9>?@@E6.95)$6B?N>F7B<6`NIN?D9LL9>?&C9?FN79C<6A?NJK&*?9NJ9<99&DN97CCC;""$$TR#3"@"&7A<(9$4(T$!!!!.:7A(&*:.5($/!!!;9*+:4(%!$#!WP[TR$$"!##$##![#R"S[#$'P(FBB<6`NIF?N4、6J6LCF?FHF7A9@826C97[:F@9C,;%3!%&*9.57:*+.&A@NJK6B?N>F7I6C97@J99C@IFJDN?9F77N?E6KEN@_AN?9'T('J?E99<6JIFJALF>?A6J@AINJK8;*2NJ><9F@9@?E9>6@?6L?E9>F7CNI9J@N6J6LNJ?9KN<>AN?@"'%#IF@[IFNJK826<96H95、FK9EF@:9>6I9@IF779VFH9[F>?AF77DC9?96<<9>[79JK?E84E9AJFH6NCF:796B?N>F7B<6`NIN?D9LL9>??N6J?EF?>FJ:9C6J9NJ?E9@9B6@?[7FD6A?B<6>9@[",;)#EF@:9>6I96J96L?E9IF=6?6<@L6<@9@84E9,;%FJC;*2?9>EJN_A9@>FJV69FJC76VDN97C6、9<9LL9>?NH97DJ6<9LLN>N9J?7D6JFJAJL7AC9>66J?FNJ@?66IFJD>F7BF?E@VNC9HF69?E9@BF>9:9?V99J67、EN>?9>EJ676KN9@A@NJK@E69F7>6JCN?N6J@9H9JV6<@984E9<9[EFH9:99J<9B69C!?E9@9?9>EJN_A9@F<9@?N77?66L6<9!IFJD<9@9F<>E9<@EFH9:99JV66@?7DFJCAJ@?F:79?6:9VNC97DA@9CNJNJCA@?9<6A?NJKF7K6?A<984E9<9L
3、7?@6JNJCA@?EIF<>N<>AN?@@E6V?EF??E9B<9@9J?9C<6A?NJKF7K6FJ6:?FNJIA>ENIB<6H9I9J?>6J@NC9F79LL9>?@@E6.95)$6B?N>F7B<6`NIN?D9LL9>?&C9?FN79C<6A?NJK&*?9NJ9<99&DN97CCC;""$$TR#3"@"&7A<(9$4(T$!!!!.:7A(&*:.5($/!!!;9*+:4(%!$#!WP[TR$$"!##$##![#R"S[#$'P(FBB<6`NIF?N
4、6J6LCF?FHF7A9@826C97[:F@9C,;%3!%&*9.57:*+.&A@NJK6B?N>F7I6C97@J99C@IFJDN?9F77N?E6KEN@_AN?9'T('J?E99<6JIFJALF>?A6J@AINJK8;*2NJ><9F@9@?E9>6@?6L?E9>F7CNI9J@N6J6LNJ?9KN<>AN?@"'%#IF@[IFNJK826<96H95、FK9EF@:9>6I9@IF779VFH9[F>?AF77DC9?96<<9>[79JK?E84E9AJFH6NCF:796B?N>F7B<6`NIN?D9LL9>??N6J?EF?>FJ:9C6J9NJ?E9@9B6@?[7FD6A?B<6>9@[",;)#EF@:9>6I96J96L?E9IF=6?6<@L6<@9@84E9,;%FJC;*2?9>EJN_A9@>FJV69FJC76VDN97C6、9<9LL9>?NH97DJ6<9LLN>N9J?7D6JFJAJL7AC9>66J?FNJ@?66IFJD>F7BF?E@VNC9HF69?E9@BF>9:9?V99J67、EN>?9>EJ676KN9@A@NJK@E69F7>6JCN?N6J@9H9JV6<@984E9<9[EFH9:99J<9B69C!?E9@9?9>EJN_A9@F<9@?N77?66L6<9!IFJD<9@9F<>E9<@EFH9:99JV66@?7DFJCAJ@?F:79?6:9VNC97DA@9CNJNJCA@?9<6A?NJKF7K6?A<984E9<9L
5、FK9EF@:9>6I9@IF779VFH9[F>?AF77DC9?96<<9>[79JK?E84E9AJFH6NCF:796B?N>F7B<6`NIN?D9LL9>??N6J?EF?>FJ:9C6J9NJ?E9@9B6@?[7FD6A?B<6>9@[",;)#EF@:9>6I96J96L?E9IF=6?6<@L6<@9@84E9,;%FJC;*2?9>EJN_A9@>FJV69FJC76VDN97C6、9<9LL9>?NH97DJ6<9LLN>N9J?7D6JFJAJL7AC9>66J?FNJ@?66IFJD>F7BF?E@VNC9HF69?E9@BF>9:9?V99J67、EN>?9>EJ676KN9@A@NJK@E69F7>6JCN?N6J@9H9JV6<@984E9<9[EFH9:99J<9B69C!?E9@9?9>EJN_A9@F<9@?N77?66L6<9!IFJD<9@9F<>E9<@EFH9:99JV66@?7DFJCAJ@?F:79?6:9VNC97DA@9CNJNJCA@?9<6A?NJKF7K6?A<984E9<9L
6、9<9LL9>?NH97DJ6<9LLN>N9J?7D6JFJAJL7AC9>66J?FNJ@?66IFJD>F7BF?E@VNC9HF69?E9@BF>9:9?V99J67、EN>?9>EJ676KN9@A@NJK@E69F7>6JCN?N6J@9H9JV6<@984E9<9[EFH9:99J<9B69C!?E9@9?9>EJN_A9@F<9@?N77?66L6<9!IFJD<9@9F<>E9<@EFH9:99JV66@?7DFJCAJ@?F:79?6:9VNC97DA@9CNJNJCA@?9<6A?NJKF7K6?A<984E9<9L
7、EN>?9>EJ676KN9@A@NJK@E69F7>6JCN?N6J@9H9JV6<@984E9<9[EFH9:99J<9B69C!?E9@9?9>EJN_A9@F<9@?N77?66L6<9!IFJD<9@9F<>E9<@EFH9:99JV66@?7DFJCAJ@?F:79?6:9VNC97DA@9CNJNJCA@?9<6A?NJKF7K6?A<984E9<9L
此文档下载收益归作者所有