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1、晶体生长计算软件FEMAG之DynamicSimulationoftheEntireCrystalGrowthProcess:Multi-ScaleAnalysisofMeltFlowTransientsV.Regnier,L.Wu,B.Delsaute,F.Bioul,N.VandenBogaert,F.DupretCESAME,UniversitécatholiquedeLouvain,E-mail:fd@mema.ucl.ac.beAbstractThispaperinvestigatesth
2、etransientmeltflowevolutionduringacompleteCzochralskicrystalgrowthprocess.Twobasictimescalesareconsidered.Theshortscaleconcernsthebasictransientsassociatedwithflowoscillationsatdifferentprocessstages.Accurateunderstandingoftheflowmechanismsatthisscalei
3、srequiredtodevelopanaverageaxisymmetricflowmodelforcompletedynamicsimulations.Thelongtimescaleisassociatedwiththetransientscausedbytheslowersystemevolutionoccurringduringthecompletegrowthprocess.Inordertofocusonthefundamentaleffectsgoverningtheflow,amo
4、delproblemisconsideredwheretheliquidisplacedintoapossiblyrotatingcontainerwhileadiskofsmallerdiameterrotatesonitstopsurface.Boththecontainerandthediskareisothermal.Severaltransienteffectsareinvestigatedincludingtheeffectofdiskradiusincreaseor6decrease,
5、andabruptchangesofdiskorcontainertemperatureorrotationrate.Introduction:dynamicmodelingofcrystalgrowthbymeansoftheFEMAGsoftwareThereisincreasingdemandtodayforrobust,reliableanduser-friendlysoftwaretomodelbulkgrowthtechniquessuchastheCzochralski(Cz),Liq
6、uidEncapsulatedCzochralski(LEC),FloatingZone(FZ)andVerticalBridgman(VB)processes.Theaimistohelppredict,designandcontrolthegrowthprocesses,andtobetterunderstandthefactorsaffectingcrystalquality.However,thegrowthtechniquesaremoreandmorecomplex,andoptimiz
7、ationcanbeachievedonlybyuseofsuitablenumericalmodelingthataccountsfortheseverelynon-linearphysicalphenomenainvolvedaswellasforthehighsystemthermalinertia.Theresultingproblemiscoupled,global,nonlinearanddynamic.Ontheotherhand,accuratepredictionofcrystal
8、qualityrequiresbothappropriatemodelingofthegoverningphysics,andhighlyaccuratedynamicnumericalmethodsforcomputingtheevolutionofthesolid-liquidinterfaceshapeandthetemperaturefieldgradientinitsvicinity.TheFEMAGsimulationsoftwaredevelopedin