利用晶体生长软件FEMAG对蓝宝石晶体生长的仿真计算方法

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1、CONFIDENTIAL利用晶体生长软件FEMAG对蓝宝石晶体生长仿真模拟方法FEMAGSoftS.A.,BelgiumASPIN-OFFcompanyfromUniversitecatholiquedeLouvainBelgiumProfessorF.DupretCONFIDENTIALGeneralintroductionSapphireGrowthContentCONFIDENTIALIntroductionFormorethan25years,FEMAGSoftdevelopssimulationsoftwarededicatedtot

2、heresearchanddevelopmentofoptimalcrystalgrowthprocesses.1984FirstresearchonGermaniumgrowthinUniversityofLouvain.Prof.FrançoisDupret1989FirstresearchonSilicongrowthinUniversityofLouvain.1992FirstcollaborationswithmajorICcompanies.Developmentofdefect-freesiliconwaferproduction.

3、Today,morethan35patentsarereferencingFEMAGSoftware2003FEMAGSoftS.A.,spin-offfromUniversityofLouvain.2006CollaboratrionwithmajorSolarcompanies.Developmentoflow-costandlow-oxygencontentprocesses.2009Largeinvestmentforanewsoftwareframework2010ReleaseofSoftwareapplicationforSapphi

4、reingotproduction.CONFIDENTIALCzochralskiprocessCONFIDENTIALDirectionalSolidificationSystemCONFIDENTIALFloatingZoneProcessCONFIDENTIALSapphireGrowthbyCZandkyropoulosCONFIDENTIALSapphiregrowthbyHEMCONFIDENTIALWhatareFEMAGsoftware?Process-dedicatedsimulationtools,adaptedtoyourow

5、nprocessesandabletosolveyourproblems.GlobalAllthefurnacecomponentsareconsidered.Alltheheattransfermodeareconsidered(radiationtransfer,heatconduction,meltandgasconvection)InductionandohmicheatingTimeDependentCONFIDENTIALProcess-dedicatedtoolsFEMAG-CZ:CzochralskiFEMAG-FZ:Floatin

6、gZoneFEMAG-VB:VerticalBridgmanFEMAG-CZ/OX:CzochralskiforSapphireFEMAG-KY:KyropoulosFEMAG-DS:DirectionalSolidificationFEMAG-HEM:HeatExchangeMethodGainoftime.ProcessmasteringAccurateandrighttothepointCONFIDENTIALPlatformorientedFRAMEWORK:FEMAG3RADIATIONCONVECTION…MESHGEOMETRYCON

7、DUCTIONFEMAG-CZFEMAG-HEMFEMAG-DSFEMAG-KYROPOULOSFEMAG3NEW2011Veryaccurate:FiniteElementandSpectralmethodsVeryefficient:3Dsimulationsinless1dayVeryflexible:Veryfastdevelopmentofnewdemand…CONFIDENTIALGlobalsimulationsCzochralskiFurnaceforSiliconHEMFurnaceforSapphireNosimplificat

8、ionoftheprocessconditionsCONFIDENTIALDynamicsimulationsAdynam