CVD化学沉积 工艺详细讲解

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1、CCVVDDᎹᎹ㡎㡎ҟҟ㒡㒡CAOJING/PL2008/11/24COMENTCOMENTCVDٝྼؠ೭CVDٝྼࠚ౵CVDٝྼඋ໿ϵ೴ࠚ౵CVDШߎ࿓ШPart1ġCVDٝྼؠ೭CVDՇ࿌CVDٝྼԅඋԤރ࿫ޔԅ༪႔CVDٝྼԅדफϢලफ໸CVDٝྼඋ໿ΑࠀCVD੧ಓЩڶёCVD੧ၽICᄯԅ࿫ဈCCVVDDᎹᎹ㡎㡎DefinitionChemicalVaporDeposition(࣪ᄺ⇨Ⳍ≝⿃˅canbedefinedasthedepositionofasolidonaheatedsurfacefro

2、machemicalreactioninthevaporphase.䗮䖛࣪ᄺডᑨ៪ᰃ⛁ߚ㾷ѻ⫳࣪ᄺব࣪㝰Ё᠔᳝ⱘᴤ᭭⠽䋼䛑⑤Ѣ໪䚼ⱘ⑤࣪ᄺ⇨Ⳍ⎔⿃Ꮉ㡎Ёⱘডᑨ⠽ᖙ乏ҹ⇨ⳌᔶᓣখࡴডᑨEssenceItbelongstotheclassofvapor-transferprocesseswhichisatomisticinnature,thatisthedepositionspeciesareatomsormoleculesoracombinationofthese.⎔⿃䖛⿟ᰃॳᄤ៪ߚᄤП䯈ⱘডᑨCCVVDDᎹᎹ㡎㡎ⱘⱘ

3、⡍⡍⚍⚍ঞঞডডᑨᑨࠖࠖⱘⱘ䗝䗝ᢽᢽϔǃCVDᎹ㡎ⱘ⡍⚍˖˄1˅CVD៤㝰⏽ᑺ䖰ԢѢԧᴤ᭭ⱘ❨⚍ˈޣ䕏㹀ᑩⱘ⛁ᔶবˈޣᇥ⦋∵ˈᡥࠊ㔎䱋⫳៤ˈޣ䕏ᴖ䋼ݡߚᏗˈ䗖Ѣ⌙㒧Ꮉ㡎DŽ䆒໛ㅔऩǃ䞡໡ᗻདDŽ˄2˅CVD㝰ⱘ៤ߚৃ㊒⹂᥻ࠊˈ䜡↨㣗ೈ䕗໻DŽ˄3˅⎔⿃䗳⥛ᖿˈѻ㛑ᔎDŽ˄4˅CVD㝰㒧ᵘ㟈ᆚǃᅠᭈˈϢ㹀ᑩ咣䰘ᗻདˈৄ䰊㽚Ⲫᗻ㛑དDŽѠǃ䗝ᢽCVDডᑨࠖⱘޚ߭˖˄1˅ডᑨࠖⱘ㒃ᑺঞ㪌≑य़ᖙ乏䎇໳催DŽ˄2˅ডᑨࡃѻ⠽ᖙ乏ᰃ催᣹থᗻⱘˈϡܕ䆌⇨ᗕࡃѻ⠽䖯ܹ⎔⿃㭘㝰Ё˄3˅⎔⿃⠽ᖙ乏ᰃ〇ᅮⱘ࣪ড়⠽ǃ೎⒊ԧ៪᣹থᗻᵕԢⱘ⠽䋼ˈᖙ乏݋᳝䎇໳Ԣⱘ㪌≑

4、य़ҹ䆕ᭈϾ⎔⿃䖛⿟Ё㭘㝰㛑໳ྟ㒜⬭೼㹀ᑩ㸼䴶Ϟ˄4˅䳔㗗㰥CVDডᑨⱘ⛁࡯ᄺǃࡼ࡯ᄺǃ㭘㝰ⱘ㒧᱊ᄺㄝ⡍ᗻҹঞ⫳ѻⱘᅝܼᗻDŽCVDCVDᎹᎹ㡎㡎ⱘⱘߚߚ㉏㉏⾡㉏㭘㝰⑤ᴤ᭭ϔǃᣝᎹ㡎ᴵӊЏ㽕ߚЎ˖Si(໮᱊)SiH4(⸙⛋)˄1˅APCVD˄ᐌय़CVD˅ञᇐԧSiCl2H2(Ѡ∃⸙⛋˗DCS)˄2˅LPCVD˄Ԣय़CVD˅Si(ऩ᱊)SiCl3H(ϝ∃⸙⛋˗TCS)SiCl4(ಯ∃⸙⛋˗Siltet)˄3˅PECVD˄ㄝ⾏ᄤ๲ᔎCVD˅LPCVDSiH4,O2˄4˅PCVD˄ܝCVD˅SiO2(⦏⩗)PECVDSiH4,N2O˄5

5、˅ĂĂҟ⬉䋼PECVDSi(OC2H5)4(ಯЭ⇻෎⸙⛋ˈTEOS),O2LPCVDTEOSѠǃᣝ⫳៤㝰ⱘᗻ䋼ৃߚЎ˖TMAPCVD&SACVDTEOS,O3(ozone)˄1˅䞥ሲCVDOxynitrideSiH4,N2O,N2,NH3˄2˅ञᇐԧCVDPECVDSiH4,N2,NH3Si3N4LPCVDSiH4,N2,NH3˄3˅ҟ䋼CVDLPCVDC8H22N2Si(BTBAS)W(䩼)WF6(݁⇳࣪䩼),SiH4,H2೼IC⫳ѻࠊ䗴䖛⿟ЁˈCVDᎹ㡎ৃ⫳䭓ҟ䋼㝰ǃञᇐԧ㝰ǃᇐԧ㝰ҹঞ䍙ᇐ㝰DŽWSi2WF6(݁⇳࣪䩼),

6、SiH4,H2Џ㽕䖤⫼CVDᎹ㡎⫳䭓ҟ䋼㝰˄SiO2ǃSiN˅ǃᇐԧTiNTi[N(CH3)2]4(TDMAT)ञᇐԧ㝰˄Polyˈetc˅ǃᇐԧ㝰˄WǃWsiˈTiTiCl4etc˅DŽCuϡϡৠৠ㉏㉏ൟൟⱘⱘCCVVDDঞঞ݊݊⡍⡍ᗻᗻᎹ㡎Ӭ⚍㔎⚍ᑨ⫼ৄ䰊㽚Ⲫ㛑࡯Ꮒˈ᳝ডᑨㅔऩˈ⎔⿃䗳Ԣ⏽SiO2˄ᦎᴖ៪ϡAPCVD˄ᐌय़CVD˅乫㉦∵ᶧˈԢѻᑺᖿˈԢ⏽ᦎᴖ˅ߎ⥛催⏽ˈԢⱘ⎔⿃䗳催㒃ᑺ੠ഛࣔᗻˈϔ催⏽SiO2˄ᦎᴖ៪ϡ⥛ˈ䳔㽕᳈໮ⱘ㓈LPCVD˄Ԣय़CVD˅㟈ⱘৄ䰊㽚Ⲫ㛑࡯ˈᦎᴖ˅ǃSi3N4ǃ໮᱊ᡸˈ㽕∖ⳳぎ㋏㒳ᬃ໻ⱘ⸙⠛

7、ᆍ䞣⸙ǃWǃWSi2ᣕ催ⱘ⏅ᑺ↨䯈䱭ⱘ฿ㄝ⾏ᄤԧ䕙ࡽCVD㽕∖RF㋏㒳ˈ催៤Ԣ⏽ˈᖿ䗳⎔⿃ˈདܙˈ䞥ሲϞⱘԢ⏽ㄝ⾏ᄤԧ๲ᔎCVD(PECVD)ᴀˈय़࡯䖰໻Ѣᓴⱘৄ䰊㽚Ⲫ㛑࡯ˈདSiO2,ILD-1,ILD,Ўњ催ᆚᑺㄝ⾏ᄤԧ࡯ˈ࣪ᄺ⠽䋼˄བH2)ⱘ䯈䱭฿ܙ㛑࡯ঠ䭊ጠ㒧ᵘⱘ䪰㉑᱊CVD(HDPCVD)੠乫㉦⊒∵ሖˈ䩱࣪(Si3N4)CVDCVDᓂᓂسس叿叿㧄㧄࿓࿓ᄭޗறࠩ㧃དྷ䨟।૿ᄭޗறګढ㦮䫑Κش܂ுګ䬗૿।ڇறޗᄭ㣅ฝ૿।ڇ•ᩥ᫿ࢨਢᩥઌᄭޗற劓䬗ᕴ㡕•ᄭޗற䮃ཋઠ㧄㤈੺䪾ڢ൷⡣ഗ।૿•ᄭޗறܮॵڇഗ।૿Ղ•ܮॵऱ଺ޗற٦ഗ

8、।૿Ղฝ㣅䫑㦮ढګ叿䫑㦮ढګ叿Δ䊎ኲ૿䨞•ڇഗ।૿Ղ䬞ࡨ֏䝤䬗•ࡐ䬾೫䣈ढڇഗ।૿Ղګདྷு•དྷுس叿ګ䫑㦮ढ•䫑㦮ढٽڢګ劖但ऱᜳᓂ•ࠡ،ᩥ᫿೫䣈঴㡘ഗ।૿Ղ㷯ॵ勋נ•ᩥ᫿೫䣈঴䮃ཋ㧄㤈੺䪾•ᩥ᫿೫䣈঴ੌנ䬗ᕴ.䫑㦮ढٽڢ劖但ᜳᓂCVDCVD㝰㝰೼೼ICICЁЁⱘⱘᑨᑨ⫼⫼1