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1、CCVVDDᎹᎹ㡎㡎ҟҟ㒡㒡CAOJING/PL2008/11/24COMENTCOMENTCVDٝྼؠ೭CVDٝྼࠚCVDٝྼඋϵࠚCVDШߎ࿓ШPart1ġCVDٝྼؠ೭CVDՇ࿌CVDٝྼԅඋԤރޔԅ༪႔CVDٝྼԅדफϢලफCVDٝྼඋΑࠀCVD੧ಓЩڶёCVD੧ၽICᄯԅဈCCVVDDᎹᎹ㡎㡎DefinitionChemicalVaporDeposition(࣪ᄺ⇨Ⳍ≝⿃˅canbedefinedasthedepositionofasolidonaheatedsurfacefro
2、machemicalreactioninthevaporphase.䗮䖛࣪ᄺডᑨᰃ⛁ߚ㾷ѻ⫳࣪ᄺব࣪㝰Ё᠔᳝ⱘᴤ᭭⠽䋼䛑⑤Ѣ䚼ⱘ⑤࣪ᄺ⇨Ⳍ⎔⿃Ꮉ㡎Ёⱘডᑨ⠽ᖙ乏ҹ⇨ⳌᔶᓣখࡴডᑨEssenceItbelongstotheclassofvapor-transferprocesseswhichisatomisticinnature,thatisthedepositionspeciesareatomsormoleculesoracombinationofthese.⎔⿃䖛ᰃॳᄤߚᄤП䯈ⱘডᑨCCVVDDᎹᎹ㡎㡎ⱘⱘ
3、⡍⡍⚍⚍ঞঞডডᑨᑨࠖࠖⱘⱘ䗝䗝ᢽᢽϔǃCVDᎹ㡎ⱘ⡍⚍˖˄1˅CVD៤㝰⏽ᑺ䖰ԢѢԧᴤ᭭ⱘ❨⚍ˈޣ䕏㹀ᑩⱘ⛁ᔶবˈޣᇥ⦋∵ˈᡥࠊ㔎䱋⫳៤ˈޣ䕏ᴖ䋼ݡߚᏗˈ䗖Ѣ⌙㒧Ꮉ㡎DŽ䆒ㅔऩǃ䞡ᗻདDŽ˄2˅CVD㝰ⱘ៤ߚৃ㊒⹂ࠊˈ䜡↨㣗ೈ䕗DŽ˄3˅⎔⿃䗳⥛ᖿˈѻ㛑ᔎDŽ˄4˅CVD㝰㒧ᵘ㟈ᆚǃᅠᭈˈϢ㹀ᑩ咣䰘ᗻདˈৄ䰊㽚Ⲫᗻ㛑དDŽѠǃ䗝ᢽCVDডᑨࠖⱘޚ߭˖˄1˅ডᑨࠖⱘ㒃ᑺঞ㪌≑य़ᖙ乏䎇催DŽ˄2˅ডᑨࡃѻ⠽ᖙ乏ᰃ催থᗻⱘˈϡܕ䆌⇨ᗕࡃѻ⠽䖯ܹ⎔⿃㭘㝰Ё˄3˅⎔⿃⠽ᖙ乏ᰃ〇ᅮⱘ࣪ড়⠽ǃ⒊ԧথᗻᵕԢⱘ⠽䋼ˈᖙ乏᳝䎇Ԣⱘ㪌≑
4、य़ҹ䆕ᭈϾ⎔⿃䖛Ё㭘㝰㛑ྟ㒜⬭㹀ᑩ㸼䴶Ϟ˄4˅䳔㗗㰥CVDডᑨⱘ⛁ᄺǃࡼᄺǃ㭘㝰ⱘ㒧ᄺㄝ⡍ᗻҹঞ⫳ѻⱘᅝܼᗻDŽCVDCVDᎹᎹ㡎㡎ⱘⱘߚߚ㉏㉏⾡㉏㭘㝰⑤ᴤ᭭ϔǃᣝᎹ㡎ᴵӊЏ㽕ߚЎ˖Si()SiH4(⸙⛋)˄1˅APCVD˄ᐌय़CVD˅ञᇐԧSiCl2H2(Ѡ∃⸙⛋˗DCS)˄2˅LPCVD˄Ԣय़CVD˅Si(ऩ)SiCl3H(ϝ∃⸙⛋˗TCS)SiCl4(ಯ∃⸙⛋˗Siltet)˄3˅PECVD˄ㄝ⾏ᄤᔎCVD˅LPCVDSiH4,O2˄4˅PCVD˄ܝCVD˅SiO2(⦏⩗)PECVDSiH4,N2O˄5
5、˅ĂĂҟ⬉䋼PECVDSi(OC2H5)4(ಯЭ⇻⸙⛋ˈTEOS),O2LPCVDTEOSѠǃᣝ⫳៤㝰ⱘᗻ䋼ৃߚЎ˖TMAPCVD&SACVDTEOS,O3(ozone)˄1˅䞥ሲCVDOxynitrideSiH4,N2O,N2,NH3˄2˅ञᇐԧCVDPECVDSiH4,N2,NH3Si3N4LPCVDSiH4,N2,NH3˄3˅ҟ䋼CVDLPCVDC8H22N2Si(BTBAS)W(䩼)WF6(݁⇳࣪䩼),SiH4,H2IC⫳ѻࠊ䗴䖛ЁˈCVDᎹ㡎ৃ⫳䭓ҟ䋼㝰ǃञᇐԧ㝰ǃᇐԧ㝰ҹঞ䍙ᇐ㝰DŽWSi2WF6(݁⇳࣪䩼),
6、SiH4,H2Џ㽕䖤⫼CVDᎹ㡎⫳䭓ҟ䋼㝰˄SiO2ǃSiN˅ǃᇐԧTiNTi[N(CH3)2]4(TDMAT)ञᇐԧ㝰˄Polyˈetc˅ǃᇐԧ㝰˄WǃWsiˈTiTiCl4etc˅DŽCuϡϡৠৠ㉏㉏ൟൟⱘⱘCCVVDDঞঞ݊݊⡍⡍ᗻᗻᎹ㡎Ӭ⚍㔎⚍ᑨ⫼ৄ䰊㽚Ⲫ㛑Ꮒˈ᳝ডᑨㅔऩˈ⎔⿃䗳Ԣ⏽SiO2˄ᦎᴖϡAPCVD˄ᐌय़CVD˅乫㉦∵ᶧˈԢѻᑺᖿˈԢ⏽ᦎᴖ˅ߎ⥛催⏽ˈԢⱘ⎔⿃䗳催㒃ᑺഛࣔᗻˈϔ催⏽SiO2˄ᦎᴖϡ⥛ˈ䳔㽕ⱘ㓈LPCVD˄Ԣय़CVD˅㟈ⱘৄ䰊㽚Ⲫ㛑ˈᦎᴖ˅ǃSi3N4ǃᡸˈ㽕∖ⳳぎ㋏㒳ᬃⱘ⸙⠛
7、ᆍ䞣⸙ǃWǃWSi2ᣕ催ⱘ⏅ᑺ↨䯈䱭ⱘ฿ㄝ⾏ᄤԧ䕙ࡽCVD㽕∖RF㋏㒳ˈ催៤Ԣ⏽ˈᖿ䗳⎔⿃ˈདܙˈ䞥ሲϞⱘԢ⏽ㄝ⾏ᄤԧᔎCVD(PECVD)ᴀˈय़䖰Ѣᓴⱘৄ䰊㽚Ⲫ㛑ˈདSiO2,ILD-1,ILD,Ўњ催ᆚᑺㄝ⾏ᄤԧˈ࣪ᄺ⠽䋼˄བH2)ⱘ䯈䱭฿ܙ㛑ঠ䭊ጠ㒧ᵘⱘ䪰㉑CVD(HDPCVD)乫㉦⊒∵ሖˈ䩱࣪(Si3N4)CVDCVDᓂᓂسس叿叿㧄㧄࿓࿓ᄭޗறࠩ㧃དྷ䨟।૿ᄭޗறګढ㦮䫑Κش܂ுګ䬗૿।ڇறޗᄭ㣅ฝ૿।ڇ•ᩥࢨਢᩥઌᄭޗற劓䬗ᕴ㡕•ᄭޗற䮃ཋઠ㧄㤈䪾ڢ൷⡣ഗ।૿•ᄭޗறܮॵڇഗ।૿Ղ•ܮॵऱޗற٦ഗ
8、।૿Ղฝ㣅䫑㦮ढګ叿䫑㦮ढګ叿Δ䊎ኲ૿䨞•ڇഗ।૿Ղ䬞ࡨ֏䝤䬗•ࡐ䬾೫䣈ढڇഗ।૿Ղګདྷு•དྷுس叿ګ䫑㦮ढ•䫑㦮ढٽڢګ劖但ऱᜳᓂ•ࠡ،ᩥ೫䣈㡘ഗ।૿Ղ㷯ॵ勋נ•ᩥ೫䣈䮃ཋ㧄㤈䪾•ᩥ೫䣈ੌנ䬗ᕴ.䫑㦮ढٽڢ劖但ᜳᓂCVDCVD㝰㝰ICICЁЁⱘⱘᑨᑨ⫼⫼1