本征缺陷和杂质对硅微纳结构机械性能的影响研究

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1、分类号TP114.3学号13039012ＵＤＣ密级公开工学博士学位论文本征缺陷和杂质对硅微纳结构机械性能的影响研究博士生姓名刘彬学科专业机械工程研究方向可靠性试验与评估指导教师陈循教授国防科学技术大学研究生院二〇一六年十月InvestigationontheEffectsofIntrinsicDefectsandImpuritiesontheMechanicalPropertiesofSilicon-basedMicro-/Nano-StructuresCandidate：LiuBinSupervisor：Prof.ChenXunAdis

2、sertationSubmittedinpartialfulfillmentoftherequirementsforthedegreeofDoctorofEngineeringinMechanicalEngineeringGraduateSchoolofNationalUniversityofDefenseTechnologyChangsha，Hunan，P.R.ChinaOctober，2016国防科学技术大学研究生院博士学位论文目录摘要..................................................

3、.................................................................................iAbstract............................................................................................................................iv第一章绪论...................................................

4、...............................................................11.1研究背景及意义..............................................................................................11.2硅晶体的力学特性..........................................................................................21

5、.2.1硅晶体的结构........................................................................................21.2.2硅晶体的刚度........................................................................................21.2.3硅晶体的断裂韧性和断裂强度.......................................................

6、.....31.2.4硅晶体的脆性和塑性............................................................................41.2.5硅晶体的疲劳........................................................................................51.3硅基微纳结构的可靠性..............................................................

7、....................81.3.1振动冲击断裂........................................................................................81.3.2粘附........................................................................................................91.3.3疲劳................................

8、........................................................................91.3.4摩擦和磨损.............