基于硅基微纳结构表面修饰的生化传感特性的基础的研究

《基于硅基微纳结构表面修饰的生化传感特性的基础的研究》由会员上传分享，免费在线阅读，更多相关内容在学术论文-天天文库。

1、中北大学学位论文theexperiment.Enzymaticactivityofthestructuresurfacereachedthepeakatthetemperatureof40oC.Testedthe1%-7%glucoseresolutiontoobtainthelinearcurveofconcentration–resonantwavelengthshiftiness.Theshiftinessofresonantwavelengthis80nmwith1%increaseofglucoseresolutionconcentration.Keyw

2、ords:Opticalbiologicalsensor,Siliconbasedmicroandnanostructure,Surfacemodification,Molecularmembrane中北大学学位论文目录第一章绪论.......................................................11.1论文研究背景及意义..........................................11.2生物传感器简介..............................................11.

3、3光学谐振腔..................................................41.4本文工作及安排..............................................6第二章.硅微纳结构生物传感器原理...............................92.1硅基波导微环谐振系统........................................92.1.1倏逝波原理.............................................92.2.2波导微环耦合系统

4、......................................122.2表面修饰技术...............................................142.3硅基波导结构的主要性能指标.................................172.3.1谐振波长λm..........................................182.3.2谐振频率Δf..........................................182.3.3自由光谱空间FSR............

5、..........................182.3.4谐振峰半高全宽Dn.....................................192.3.5品质因数Q............................................192.4本章小结...................................................20第三章.硅基微纳结构设计仿真优化与加工.......................213.1波导微环耦合结构设计与仿真............................

6、.....213.1.1环形谐振腔半径的仿真分析..............................223.2.2波导与微环腔耦合间距仿真分析..........................243.2.3光波导宽度仿真分析....................................253.2微器件加工工艺简介.........................................263.2.1光刻（Photolithography）..............................273.2.2电子束曝光........

7、....................................283.2.3电子束蒸镀............................................283.2.4干法刻蚀..............................................293.3硅基微纳结构制备工艺流程...................................303.4硅基微纳结构制备...........................................333.5本章小结...................

8、.....