SiC反射镜电弧增强等离子体加工关键技术研究

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1、分类号TH161学号12039017ＵＤＣ密级公开工学博士学位论文SiC反射镜电弧增强等离子体加工关键技术研究博士生姓名史宝鲁学科专业机械工程研究方向精密工程与计算机控制指导教师戴一帆教授国防科学技术大学研究生院二〇一六年十月StudyonKeyTechniquesinArc-enhancedPlasmaMachiningforSiliconCarbideMirrorsCandidate：ShiBaoluSupervisor：Prof.DaiYifanAdissertationSubmittedinpartialfulfill

2、mentoftherequirementsforthedegreeofDoctorofEngineeringinMechanicalEngineeringGraduateSchoolofNationalUniversityofDefenseTechnologyChangsha，Hunan，P.R.ChinaOctober，2016国防科学技术大学研究生院博士学位论文目录摘要………………………………………………………………………………………...………iAbstract……………………………………………………………………...…

3、………………..…iii第一章绪论..................................................................................................................11.1课题研究背景及意义..............................................................................11.1.1课题来源与目标...............................

4、............................................11.1.2课题背景和研究意义...................................................................11.2国内外研究现状......................................................................................41.2.1SiC反射镜加工方法...........................

5、.........................................41.2.2等离子体加工...............................................................................91.3本文主要内容........................................................................................28第二章电弧增强等离子体发生器设计和电压特性研究...........

6、.............................302.1电弧增强等离子体加工系统..................................................................302.2电弧增强等离子体发生器....................................................................332.2.1等离子体通道模型.......................................................

7、..............362.2.2等离子体等效电路模型.............................................................422.2.3等离子体发生器设计.................................................................522.3电弧增强等离子体电压特性研究........................................................542.3.1自由燃烧等离子体电压测

8、量.....................................................542.3.2电弧等离子体电压测量.............................................................622.3.