微纳米测量环境恒温气流组织及均匀温度场数值模拟

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1、’r87晷《l辱微纳米测量环境·随温气流缎织及均匀温度场数值模拟Nume西calStudyontheConstantTemperatureEnvironmentandAirDistributionofNano—ScaleMeasurement作者姓名至委学位类烈——一掌压亟～±学瓣、专业(工程领域》．摄蜜戗墨殛执越磷究方彝。量至强遮夔壅；建毯墨—。导师及职称送龌熬援2006年5月AccuracyResearchintheMechanicalVisualMeasuringSystemAbstractThisresearchispartofal

2、lIntemationalCooperationProjectwimNoahAustraliaUniversityandfoundedbyNationalNaturalScienceFoundationofChinaundercontractnumber：50420120134．Theenvironmentplaysallimportantroleinhigh-preciseNano-Scalemeasurement．Hi曲一precisemeasurementisbasedoncontrolofenvironment，butonlymea

3、surementinstrumentsitselfneedshigh-preciseenvironment，SOitisverysignificanttodesignahighpreciseconstanttemperatureinsulatedcabinetforNano．Scalemeasuremeut．Theinstrumentsisheatedwhenitworks．itmakestheenvironmenttemperatureununiformity,thusappearedsomeblindareaoftemperatureo

4、rintensiveairmovement，itinfluencetheresultofmeasurement．Thetemperatureuniformityoftheworkingplaceisdependingonthemechanicalstructuredesign．Besides，whenreducethetemperatureofinletairflowdoesn’tworkobviously．Plus，wecanisolatetheheatsourceandcoolingitseparateness．Themathemati

5、calmodelofthetemperaturefieldofthesemiconductorrefrigerationdeviceisdescribedonthispaper，andanumericalstudyonthetemperatureprofileinasemiconductorrefrigerationdevicewascarriedoutusingthismodel．Numericalsimulationisappliedtothepresentthermostatedcontainers．Thenthespacetempo

6、directioninthecaseofthegasflows，distributionofpressureineachpoint，thedataofthree·dimensionaltemperaturefield，etc．aregained．Theproblemsinpresentthermostatedcontainersarediscussed，thefactorinfluencingcurrentairorganizationandtemperaturefieldareanalyzed．Keywords：Nano—Scalemea

7、surement，Uniformityoftemperature，AirdistributionNumericalsimulation，Thermotank插图清单图1．1构想中理想的纳米测量环境⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯．图1-2美国NIST的MolecularMeasuringMachine示意图⋯⋯⋯⋯．图1-3韩国BUPE的超高精度CMM⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯．图2．1恒温箱体结构模型⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯．图2-2恒温箱照片⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯．．图2．3侧送风仿真图⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯

8、⋯⋯⋯⋯⋯⋯⋯⋯．图2-4孔板送风仿真图⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯．图2-5导风口照片⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯．．图2-6孔板照片⋯⋯⋯⋯⋯⋯⋯⋯⋯