软X射线激光多层膜反射镜及分光元件的研制

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1、浙江大学硕士学位论文软x射线激光多层膜反射镜及分光元件的研制姓名：易葵申请学位级别：硕士专业：光学工程指导教师：范正修;刘旭2002.1.4————一整苎壁堂整垒妻墨堡墨璺堡苎坌垒委堡壁竺篓!墨整整!要AbstractAbriefreviewonx-raysourceandx-rayopticalcomponentsaswellasthepresentstatusofresearchanddevelopmentforx-raymultilayersWasillustratedinthefirstchapterofthispaperAndinthe

2、secondchapterthetheoreticaldesignandperformanceanalysisofx-raymultiplayermirrorswerediscussed．ThetraditionalopticalthinfilmtheoryWassuccessfullyappliedinthedesignofx-raymultilayers．Somecomputerprogramswerecomposedfordesigningandanalyzingx-raymultilayercharacteristics．Thedepos

3、itiontechnologywasintroducedinthe懿rdchapter．Atechniqueofrotation·speedthicknessmonitor,averyeffectivemonitoringmethodindepositing静raymultilayers，WaSdevelopedinourwork．Andthethicknessofultra-thinlayerwasderivedfromsmallanglex-raydiffractionusingtheBragg’sequationwitharefractio

4、ncorrection，Alsothetestingresultsofx-raymultitayermirrorswerepresentedinthethirdchapter．Ahighreflectivityofabout50％atwavelengthof13，9nmWetsacquiredbysynchrotronradiationreflecto-meter．Andallaveragereflectivityof26．2％wasobtainedat13．1nmwi墩anincidenceangleof45。．whichreachedthe7

5、0percentoftheoryvalueandwasoneofthehighestrefleetivityamongtherepogedresults．Theinfluenceofroughnessonthereflectanceofsoftx-raymultilayercoatingwaspresentedfromtheoreticalandexperimentalanalysis,andalloptimalfittingmethodwasgivenforx-raymultilayermirrorsdesign．Itwasimportantf

6、orimprovingtheperformanceofx-raymultilayer．Inthechapterfourwediscussedthefabricationandperformancetestofbeamsplittersforsoftx-rays。Thex-raymll融layerwithoutsubs矗'atesupporting(substrate·freemultilayer)waspreparedandthecharacteristicsofx-raybeamsplitterweremeaSuredsuccessfullyf

7、orthefirsttimeinourcouna3：Key"words：X-raymultiplayer,beamsplitter,x-rayreflectivity,snbstrate-free梦江大芏婴士研究生毕业论文，2001年第5页1综述x射线通常是指0．Ol～30nm光谱范围的电磁波，进一步又可细分为硬x射线(O．叭～1nm)_搴n软x射线(1～30rim)。“x射线光学”这一术语最先出现于Baez(1950)的博士论文中。此后30年中，受光源及光学元件制作技术的限制，j射线光学的发展十分缓慢。同步辐射等高亮度光源的问世，微细加工技术的

8、发展，使x射线光学焕发青春，以空前的规模和速度飞快发展。特别是在“水窗”波段(2．3～4．4nm)的软x射线中，蛋白质与水的吸收系数相差