磁控溅射复合金属氮化物薄膜和纳米多层膜的摩擦磨损性能

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1、浙江大学硕士学位论文磁控溅射复合金属氮化物薄膜和纳米多层膜的摩擦磨损性能姓名：顾斌申请学位级别：硕士专业：材料科学与工程指导教师：涂江平20070601浙江大学硕￡学位论文AbstractOwningtothehighhardness,goodoxidationresistanceandmanyotherexcellentproperties，transitionmetalnitridenano-cumpositeandnano-multilayeredfilmsCallimproveperformanceofcuttingt

2、oolsandextendtheirlife-spans，whichwouldresultinpromisingprospectsinindustrialapplication．Uponthis，thepresentworkisdedicatedtoimprovethetribologicalpropertiesofthefilms．Ti-Si-NnaonocompositefilmsandCr-W-N，Cr-Mo-NseriesfilmswerefabricatedthroughDCmagnetronsputtering．E

3、ffectsofdepositionparametersonmierostrueture,adhesionstrengthandtribologicalpropertieswereinvestigatedtoobtaintheoptimaldepositioncondition．Compositetargets，withSiembeddedinTitargets，wereusedtodepositTi-Si-Ncompositefilmswhilesubstratetemperature,biasandpowerdensity

4、wereconstant．Themicrostruemre,morphologyofcross-sectionand$nrface,chemicalcomponentofcompositefilmswerecharacterizedbyX-raydiffxaction(XRO)，high-resolutiontransmissionelectronmicroscope(HRTEM)，scanningelectronmicroscope(SEM)，atomicforcemicroscope(AFM)andenergydisper

5、siveX-rayspectroscope(EDS)respeetivdy．Scratchtestswereappliedtodeterminetheadhesionstrengthofas-depositedfilms．Thetribologiealbehaviorwasinvestigatedusingaball·on-disktribometerinbotllvacuumandhumidair．Therelationshipbetweenmicrosturcture，morphology,propertiesanddep

6、ositionpressurewerealsodiscussed．ItwasfoundthatthecompositestruetureofTi-Si-Nfilms，nanocrystallineTiNembeddedinamorphousSi3N4matrix,wasconfirmedinthiswork．Theincreasingdepositionpressureresultedintheappearanceofcolumnarstructure,decreaseinthefilmdensity,increaseinth

7、esurfaceroughness，anddeteriorationoftheadhesionstrengthandtribologicalproperties．TheadditionofSiinthecompositefilmscouldimprovethetribologiealperformanceofthefilms．髓eCr-W-N．Cr-Mo-Nseriesfilmswerealsodepositedbymagaetronco-sputteringusingpuremetaltargets。Thevariation

8、ofthestructureWasachievedbyalteringrotationvelocityofthesubstrateholder．MicrostruetureandmorphologyofthefilmsWCI"echaracterizedbyXRD，SEM．R