资源描述：
《基于PARYLENE的柔性生物微电极阵列的研究》由会员上传分享，免费在线阅读，更多相关内容在学术论文-天天文库。
1、上海交通大学硕士学位论文基于Parylene的柔性生物微电极阵列的研究姓名：王亚军申请学位级别：硕士专业：微电子学与固体电子学指导教师：杨春生;刘景全20090201上海交通大学硕士学位论文摘要宽为50μm，间距为100μm。电极间间距为600μm，底部直径为60μm，高度大约为24μm，具有较好的半球形形貌。测试优化的电极在1kHz时，电极的阻抗和相位分别为54.12kΩ和-61.6°，阻抗中容抗占阻抗的主要部分。相比于传统的平面微电极阵列，在相同底面积上，半球形凸起能够增大电极的有效表面积，电极阻抗明显降低，同时凸起结构
2、保证电极刺激位点与神经细胞的良好接触，这有利于提高生物电刺激效果。关键词：MEMS，神经工程，ParyleneC，微电极阵列第II页上海交通大学硕士学位论文摘要ResearchofParylene-basedFlexibleMicroelectrodeArrayABSTRACTNeuroengineeringisaninterdisciplinewhichrelatestoneuroscience,microelectronictechnique,materialScience,informationscience,etc,
3、whichishelpfulforinvestigatingtheoperatingmechanismoftheneuralsystemandsolvingtheproblemsrelatedtoneuraldisordersandneuralrehabilitation.Themicroelectrodeistheinterfacebetweennervoussystemandcircuit,whichisthemostcriticalcomponentinneuroengineeringsystems.AMEMS-bas
4、edflexiblemicroelectrodearray(MEA)isstudiedinthisthesis,whichisfabricatedbyphotoresistthermalmeltingtechnology,chemicalvapordepositionParyleneC.Themaincontentsandconclusionarestatedasfollows:ThecouplingcapacitancebetweeninterconnectlinesareanalyzedbyAnsys,andthecur
5、rentdensityofdifferentsurfaceareaisanalyzedbyComsol.SomekeyquestionsforthefabricationofMEAarediscussed,accountingforelectrodepackagingmaterials,interconnectlinesandelectrodematerial,electrodegeometry.Basedontheanalyzingresult,theflexibleMEAisfabricated.Thekeyproces
6、sesduringthefabricatingMEAisresearched,includephotoresistmeltingandetchingParylenefilmsbyRIE.Theelectrochemicalimpedancespectroscopyofasingleelectrodeistestedin0.9%NaClsolution.Thetestingdataareanalyzed,andsomeadvicesareputforwardforfurtherimprovingtheelectrodeperf
7、ormances.Thefabricatedelectrodeis5×5grid,coveringanareaof3mm×3mm.第III页上海交通大学硕士学位论文摘要Thewidthoftheinterconnectlinesis50μmandthespaceis100μm.Thespaceoftwoelectrodesis600μm.Eachelectrodeis60μmdiameterandtheheightisabout24μm,whichhaveanapproximatelyhemisphericalsurface
8、profile.Theelectrodetypicallyexhibitanimpedanceof54.12kΩandthephaseshiftof-61.6°at1kHz,respectively,whichindicatesthatthemicroelectrodeismoredomi
