基于mems技术的高密度视网膜假体柔性微电极阵列的研制

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1、上海交通大学硕士学位论文Abstract明，采用新工艺制作的微电极阵列不仅具有和传统工艺同样优良的力学、电化学等性能，且刺激点密度得到了有效提升，这为视网膜假体分辨率的提高奠定了基础。关键词：视觉假体，视网膜假体，微电极阵列，MEMS，高密度II万方数据上海交通大学硕士学位论文AbstractAHIGH-DENSITYMICROELECTRODEARRAYFORVISUALPROSTHESISBASEDONMEMSTECHNOLOGYABSTRACTVisionisthemostimportantpartofsensesofhumanbeing.Havingacompleteandeffe

2、ctivevisualpathwayistheonlywaytogainnormalvision.Researchesshowthatthevisionpathwayoftheblindwasnotdamagedtotally.Bystimulatingfunction-remainedpartofvisualpathway,visualprosthesisprovidessomedegreeofartificialsightforvisualdisabledpatients.Astheneuralinterfacebetweenthevisualprosthesisandbiologic

3、altissue,theMEA(microelectrodearrays)isthekeypartofthedeviceandthegatewayofalltheinformation.AccordingtothedifferentpartsofMEA-implantpositions,therearethreekindsofprosthesises,theyarevisualcortexprosthesis,opticnerveprosthesisandretinaprosthesis.Retinaprosthesiswithagoodtopologicalcorrespondenceb

4、etweenthestimulatingsiteandthevisualfield,doinglessharmtotissues,andkeepingmostfunctionsofthevisualpathisbecomingthemostpracticalandprospectiveoneofprosthesises.Toenhancetheartificialsightoftheblindwhoreceivesprosthesisimplant,resolutionisoneofthekeyfactorsofprosthesises.Therefore,itrequiresMEAade

5、nsityhighenoughofstimulatingsites.BasedonMEMStechnologywedesignedandfabricatedtwokindsofMEAswithdifferentdensitiesofstimulatingsites.Theywerebothmadeofphotosensitivepolyimide(PI)asthebaseandplatinumasthematerialofconductingmetallayer.Titaniumlayerwasplacedbetweenthebaseandtheconductingmetallayerto

6、getbetteradhesion.Withtraditionalcraftwemadethe1stvisionofMEAwhichhas30channelsand350μmdiameterofstimulatingpoint.Thestimulatingsiteswasarrangedby6×5with1optionalreturnelectrodes.Widthoftheinterconnectlineis30μmandtheminimumwidthIII万方数据上海交通大学硕士学位论文Abstractbetweeninterconnectlinesis40μm.Toamendthed

7、isadvantagesofLift-OffmethodandimprovethepropertyofMEA,weintroducedIonBeammethodtodevelopanewprocessoffabrication.Withthenewway,wemadethe2ndvisionofMEAwith121channels.Itwasmadebysingle-layerprocesstechnology,thed