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1、物理化学学报(WuliHuaxueXuebao)NovemberActaPhys.鄄Chim.Sin.,2006,22(11)：1413耀14181413[Note]www.whxb.pku.edu.cn含氮磷酸锂薄膜在空气中的稳定性1,211,*刘文元李驰麟傅正文(1复旦大学化学系激光化学研究所,上海200433；2西北核技术研究所,西安710024)摘要利用射频(RF)磁控溅射方法制备了含氮磷酸锂(LiPON)薄膜.采用SEM、XRD、XPS等技术以及交流阻抗法和电位线性扫描法,研究了空气湿度对LiPON薄膜形貌、组成和性能的影响.结果表明,
2、LiPON薄膜在湿度为40%的空气环境中放置24h后,将发生明显的水解反应,使LiPON薄膜表面形貌变得疏松、局部突起；PH3和NH3的产生,使薄膜中磷元素和氮元素含量减少,而Li2CO3的生成,则使薄膜中碳元素和氧元素含量有明显的增加.LiPON电解质薄膜形貌和组成的变化,造成了薄膜电化学性能的严重恶化.关键词：LiPON薄膜,薄膜电解质,磁控溅射,全固态薄膜锂电池中图分类号：O646.2StabilityofLithiumPhosphorousOxynitrideThinFilmsinHumidAir1,211,*LIU,Wen鄄YuanLI
3、,Chi鄄LinFU,Zheng鄄Wen(1LaserChemistryInstitute&DepartmentofChemistry,FudanUniversity,Shanghai200433,P.R.China;2NorthwestInstituteofNuclearTechnology,Xi忆an710024,P.R.China)AbstractLithiumphosphorusoxynitride(LiPON)thinfilmswerepreparedbyradiofrequency(RF)magnetronsputtering.The
4、morphology,compositionandelectrochemicalperformanceofLiPONelectrolytethinfilmsplacedinhumidambientwereinvestigatedusingSEM,XRDandXPS,andelectrochemicalmeasurementsofAC(alternatingcurrent)impedanceandpotentiallinearscanning,respectively.Obviouschangesinsurfacemorphology,compos
5、itionandelectrochemicalpropertieswerefoundfortheas鄄depositedLiPONfilmplacedinhumidambientwitharelativehumidityof40%for24h.Resultsshowedthattheuniformityofthefilmsurfacebecamepoor,thecontentsofphosphorousandnitrogeninLiPONfilmdecreasedduetoitsreactionwithH2O,releasinggaseousPH
6、3andNH3.Inaddition,theformationofLi2CO3obviouslyincreasedthecontentsofcarbonandoxygeninLiPONfilm.Therefore,LiPONthinfilmsplacedinhumidambientresultedinabadeffectonitselectrochemicalperformancesuchastheionicconductivityandtheelectrochemicalstabilitywindow.Keywords:LiPONthinfil
7、ms,Thinfilmelectrolyte,Magnetronsputtering,All鄄solid鄄statethinfilmlithiumbattery随着动态随机储存器(DRAMS)、微传感器以及质薄膜和阳极薄膜三部分组成.其中,含氮磷酸锂微电机械系统(MEMS)等微电子器件朝微型化方向(LiPON,lithiumphosphorousoxynitride)薄膜是当前的发展,迫切要求有体积小,重量轻,比容量高的微全固态薄膜锂电池研究中应用最为广泛的电解质薄[3鄄5]型致密电源与其相匹配.以无机化合物材料作为电膜,这一方面是由于LiPON
8、具有较高的锂离子电-6-1解质的全固态薄膜锂电池可以很好地满足这一要导率(2.0伊10S·cm),较低的活化能(0.45eV)以及[1鄄
