VHFPECVD制备大面积硅基薄膜的研究

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1、南开大学硕士学位论文VHF-PECVD制备大面积硅基薄膜的研究姓名：王凯杰申请学位级别：硕士专业：微电子与固体电子学指导教师：薛俊明20030528童茎奎兰堡主堑窒皇望、业堡苎一一j堕!!苎2ABSTRACTThesiliconthinfilmshavewidespreadapplicationsinthefieldofphotovoltaicsolarCellsandthin．filmtransistorforflatscreenproduction．Themethodofplasmaenhancedchemicalvapordeposition

2、(PECVD)istheimportanttechniquetoproducethem，buttheconventionalPECVDmethodwith13．56MI-Izexcitationfrequencydoesnotsatisfytheneedofindustrialproduction．TheresearchhasprovedthatthesiliconthinfilmscanbedepositedbyⅧ一PECVDwithlargeareaandhighspeed，Thispapermainlydescribedaboutsevera

3、lworksasfollow：ThemainproblemistheuniformityoflargeareathinfilmswhenweusetheVI-琢-PECVDtodepositedsiliconthinfilms．Themainfactortoaffecttheuniformityofthinfilmsistheuniformityoftheelectricfielddistributionontheelectrode．Thestandingwaveisthemainfactortoaffecttheuniformityoftheel

4、ectricfielddistributionwhentheexcitationfrequencyisintherangeofⅧFIbutweCalleliminatetheaffectofthestandingwavebyselectingtheconnectionpositionofthefeedingline．WedecidetOusethemethodofthefeedinglineconnectwiththeelectrodecenter．Thecharacteroftheamorphoussiliconthinfilmdeposited

5、bythemethodis：theareais23X24cm2,thehomogeneityislessthan±10％．Wehadstudiedhowtoobtainthedevicegradeamorphoussiliconthinfilmwithlargearea，gooduniformityandhighdepositionrateWehadstillstudiedtheaffectsthegaspressure,thepowerandthefluxtotheuniformity,depositionrateandthecharactero

6、fthematerialWefoundthattoincreasethegaspressureproperlycallincreasetheuniformityofthefilms，butthechangesofthepowerhavenoeffecttOtheuniformity．Thedepositionratewillincreasewiththegaspressureandthepowerincreasingproperly．Whenthegaspressureislow,thequalityofthethinfilmsisgoodWesh

7、ouldselectthepowerproperlytoobtmnhi曲qualitythinfilms．Inthebaseofthestudies，weobtainthehighqualityoftheamorphoussiliconthinfilmsonthenormalglassbyoptimifingthedepositionconditionThebestuniformityislessthan±14％Thehighestdepositionis5．5A／sThephotosensitivityis225×105．Keywords：VHF

8、—PECVD,uniformity,amorphoussiliconthinfilm,depositionrate3南开大