三坐标测量机精度检测评定及虚拟坐标系统研究

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1、合肥工业大学博士学位论文三坐标测量机精度检测评定及虚拟坐标系统研究姓名：林慎旺申请学位级别：博士专业：精密仪器及机械指导教师：费业泰;陈朝光20040701!鱼塑三些查堂竖主兰垡丝主——ABSTRACTAsalarge，multi—functionalmodemprecisioninstrument，coordinatemeasunngmachine(CMM)hasmoreandmoreshownitsgreatimportanceandwidedevelopmentprospectinindustr

2、y．Ithastheadvantagesofstrongversatility,accurateandreliablemeasurementandconvenientdataprocessing．Itisasignificantpartinautomatedmanufacturingandflexibleproductionassembly．Thus，therearemanyresearchesonCMM．AndtheerrorCOITCctionofCMMiSthefocusofintemation

3、alresearches．Theseincludetheresearchesonrapidinspectionandinspectiontools，dynamicerrorcorrectionandthermaldeformationerrorcorrectionandSOon．ThemainworkofthispaperinvolvestheevaluationandcorrectionofCMMstaticanddynamicerrors，includingtheinspectionofCMMus

4、ingballplate，theevaluationofCMMdynamicerrors．AndalsothispaperbringsforwardanovelwayofinspectingandcorrectingCMMstaticanddynamicerrors；ell'orcorrectionbasedonvirtualcoordinatemeasuringsystem．nledetailedresearchaspectsareasfollows：Theballplatehassomepoten

5、tialapplicationsintheprecisionverificationofCNCmachineandCMM．TIlispaperdiscussestheprecisionproblemsofusingtheballplate，andanalyzestheinfluencesonthemeasuredresultssubjecttotheballplatecalibrationerrorandpositionerrorontheworkingbench．111ispaperpresents

6、twomethodswhichCanreducetheinfluencesoftheabovetwoerrorsandproposesacombinationverificationmethodtoverifytheprecisionoftheballplate．Inaddition，thispaperpresentstheexperimentofverifyingCMMaccuracywithballplate．Theexperimentalsystemofcalibratingthecenterd

7、istanceoftwoballsofballplateisgiven．AndtheresultsofverifyingtheaxisaccuracyofCMMarealsogiven．Inviewofthelimitationofcurrentcommonlyusedmethod一一thestaticevaluationmethod，whichmayresultinallincorrectassessmentowingtotheverydynamicnatureoftheCMM．thispaperp

8、resents锄errorseparationmethodfordynamicmeasuringdatatoobtaintheiraccuracyevaluationindices．ReferringtointernationalevaluationprincipleSofmeasurementuncertainty,thismethodwasderivedfromtheanalysisofdynamicmeasuringdataanddynamicme