TI6AL4V合金表面SINO薄膜的制备及性能研究

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1、西南交通大学硕士学位论文Ti6Al4V合金表面Si-N（O）薄膜的制备及性能研究姓名：黄菊申请学位级别：硕士专业：材料科学与工程指导教师：杨苹20081101西南交通大学硕士研究生学位论文第1I页耐磨性更好。随着N原子含量的增加，薄膜中Si的键合结构逐渐过渡到以Si3N4键合结构为主，有利于覆膜样品硬度的提高，从而改善了薄膜样品的耐磨性。Si．N(O)系薄膜的抗凝血性能与LTIC相当，薄膜差异不大。体内试验证实本试验制备的Si-N(O)薄膜具有一定的抗凝血性能。关键词：Si-N(O)薄膜，XPS，力学性能，血

2、液相容性西南交通大学硕士研究生学位论文第111页AbstractWiththepopulationagingaccelerateddaybyday,theincidenceofcardiovasculardiseasesincreasedandthedemandquantityoftheartificialheartvalve，stent，etc．increasedcontinuously．However,thekeyproblemtobesolvedisthedurabilityandtheanti·thr

3、ombuscapabilityofthecardiovascularimplantmaterialstobedeveloped．Surfacemodificationtechnologyisthecommonmethodtoimprovethebloodcompatibilityofmetallicbiomaterials．Thepreliminaryresultshowedthattheanti-thrombuscapabilityofSi-N(O)filmswasequivalenttoLowTemper

4、atureIsotropicPyroliticCarbon(LTIC)，SOresearchersattempttousetheSi-N(O)filmstomodifythebiomedicalmetallicmaterials．Inthispaper,thechemicalcomposition，structure，mechanicalpropertiesandthebloodcompatibilityofSi-N(o)filmsweresystematicalstudied,andtheeffectofe

5、quipmentoptimizationanddepositionconditiononthechemicalcomposition，structureandpropertiesofthefilmsWasevaluated．Inaddition，theinvivotestofthetitaniumalloymodifiedbytheSi·N(o)filmsWasperformed。Si—N(o)filmswithdifferentcomposition，microstmcture，mechanicalprop

6、ertiesweresynthesizedonTi6A14Valloyandmonocrystallinesiliconwaferbyunbalancedmagnetronsputteringtechnique，byoptimazingtheequipmentanddepositioncondition．Thechemicalcompositionandstructurewerecharacterizedwithx—rayphotoelectronspectrometry(xPs)andFouriertran

7、sforminfraredspectroscopy(FTIR)．ThefilmsthicknessWastestedbyAMBIOSXP一2profilemeterandthehydrophilic·hydrophobicpropertywastestedbyJY-82contactan#emeasurement．ThemechanicalpropertieswerecharacterizedwithHXD-1000microhardnessmeter,CSEMpin—on—diskweartestappar

8、atusandWS一97scratch西南交通大学硕士研究生学位论文第Ⅳ页tester．Plateletadhesionandanimalexperimentswereusedtoevaluatetheanticoagulationpropertyofthefilms．Afterfourroundsoptimization，the0atomcontentwasreducedeffectivelyby