深圳贝加尔镀铜添加剂cu603生产板均匀性与深镀能力评估

《深圳贝加尔镀铜添加剂cu603生产板均匀性与深镀能力评估》由会员上传分享，免费在线阅读，更多相关内容在工程资料-天天文库。

1、文件傳送和文件做成•審核•批准收件ZPTIN作成李吉平2008/6/10抄送各相關經理審核FAX批准IMishoMiciolimI」（l・2ME技術報告書文件編號:文件核心內容描述技朮項目深圳貝加爾鍍銅添加劑Cu603生產板均勻性與深鍍能力評估目標指標降低生產成本約22%報告現狀：深圳貝加爾鍍銅添加劑Cu603成本較現用的美錄徳ST-901鍍銅添加劑低22%左右，經初步外發測試評估後，在3#PTIN21#銅缸進行批量試用，對其部分制程能力進行初步的評估。技術點：根据制程情況，擬訂相對應的評估方案,對均勻性能力/高縱橫比鍍銅深鍍能力進行考察評估及數据分析。QDC變化：Q:

2、不變D:不變C1：降低成本22%左右試驗方案設計原理序號評估項目評詁指標評估方法1鍍銅高縱橫比深鍍能力測試縱橫比7:1深鍍能力:>80%切片分析：深鍍能力計算方法A:(e+f+g+h+I+j)/6三(a+b+c++d)/4xlOO%2鍍銅均鍍能力COV:<10%光板電銅后測銅厚，計算能力銅缸均鍍能力：COV二標准差/平均值X100%評估項目和相關指標:試圧厶(一)銅缸高縱橫比(10:1;7:1)深鍍能力測試方峯M給果試驗參數：(1)高縱橫比試板3塊，試板由我司提供，板厚2.0MM，孔徑為0.2MM;0.30MM，即縱橫比為10：1和7：1(2)試驗電鍍條件為：前處理正常

3、進行，電鍍銅10ASF/80MIN;銅缸藥水條件：濃度為80.5G/L，H2SO4濃度為205.5G/L，CC45PPM(3)每塊板取5個切片(縱橫比10:1;7:1各取15個切片)，共30個切片，取切片方式及讀•/、亠1S■一-■■數力耳圍如1、•(4)蝕刻後做高縱橫比通孔通斷測試I(zj1•取月不忌1回1•6買釵不尼、1回1□口ac□c<:3#PTIN刀#銅缸CU603鍍銅添加劑：bJ縱横表面图电铜厚孔壁图电铜厚深鍍縱橫表面图电铜厚孔壁图电铜厚深鍍10：1abCdefgh1J能力7:1abCdCfgh1■J能力1-129.4332.424.5625.9328.012

4、8.416.9217.7121.3323.1880.45%1-133.0231.7932.8731.7928.9928.3421.5319.6824.2326.7176.97%1-222.0524.8622.1223.5518.2918.911.2412.7718.318.771.55%1-225.5423.1424.824.623.423.8517.6118.3420.7520.7184.37%1-321.0523.4625.5526.3716.5920.4313.5213.218.6618.6369.7%1-325.6522.5227.3625.5317.6319.

5、3515.1814.1519.3321.057038%1-423.4624.5028.6528.6619.5819.0414.5113.5418.7818.3265.72%1-427.9529.3330.0228.9924.6524.5016.9118.6324.3122.0875.15%1-523.8723.823.9324.5820.820.0111.712.520.520.3873.4%1-526.2629.3524.1724.2125.5919.6717.617.2819.6718.6875.96%2-123.1319.0219.3319.219.6720.41

6、2.4211.0420.7117.6384.18%2-124.5223.8223.1823.8222.0822.7815.1815.5320.0219.0580.16%2-223.1623.8223.1223.4820.3621.1511.3912.0820.0618.6873.89%2-222.1225.2523.1325.5920.4320.7514.8415.8718.6317.9475.25%2-320.5419.8124.6223.3213.5716.2711.212.518.7121.6770.92%2-321.5720.8423.2823.2819.419

7、.9115.2815.9619.819.8682.58%2-421.1220.0822.7922.7815.1812.7710.0613.1215.8916.8764.45%2-422.7922.7823.1624.8818.3414.8413.8112.7723.5322.0875.04%2-520.721.4617.6118.2117.6117.6110.3610.416.9617.6177.41%2-519.0323.4721.1824.5621.1217.9413.4616.8519.7418.5181.31%3-124.2426