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1、NuclearInstrumentsandMethodsinPhysicsResearchB239(2005)440–450www.elsevier.com/locate/nimbAstationaryplasmathrusterformodificationofpolymerandceramicsurfacesJ.Y.Park,Y.S.Jung,Yu.A.Ermakov1,W.K.Choi*ThinFilmMaterialsResearchCenter,KoreaInstituteofScienceandTechn
2、ology,Cheongryang,P.O.Box131,Seoul130-650,SouthKoreaReceived25March2005;receivedinrevisedform10May2005Availableonline14July2005AbstractAstationaryplasmathruster(SPT)-typesourcewithhighplasmadensityisintroducedanditsphysicalprincipleandstructurearebrieflysummari
3、zed.AsgeneralcharacteristicperformanceofthegridlessSPTplasmasource,ioncurrentdensity,itsangulardistributionsanddistributionofionsoverenergiesforthreeworkinggasesofAr,N2andO2wasexaminedandalsocomparedwiththatofaconventionalKaufman-typegridionsource.Inordertoinv
4、estigatethepossibleapplicationofSPTforthesurfacemodification,polymerandceramicsurfacesareirradiatedbythelowenergyandhighfluenceionbeamgeneratedfromSPT.Thewettingangleofpolyimideisgreatlyreducedfrom78°to2–4°byþ+theirradiationofreactiveO2andN2Oionswithanaverageene
5、rgyof180eV.Furthermorewhena-Al2O3(0001)isþirradiatedbyNionofSPTsourceatvariousionfluences,theformationofnewAlAONandAlANchemicalbonding2areidentifiedbyX-rayphotoelectronspectroscopy.Fromtheresults,itisrevealedthattheSPTcanbeusedasaneffec-tiveionsourcefortheenhance
6、mentofsurfaceenergyofpolymerandfortheformationoffunctionalgroupsonceramicsurface.Ó2005ElsevierB.V.Allrightsreserved.PACS:41.75.AKeywords:Stationaryplasmathruster;Surfacemodification;Lowenergyhighfluence;Ceramicsurface;Polymersurface1.IntroductionVariousparticles
7、ourcesusedinthepresenttech-*Correspondingauthor.nologycanbemainlydividedintotwoclassesE-mailaddress:wkchoi@kist.re.kr(W.K.Choi).1[1]:griddedsourcesandgridlessones.BoththePermanentaddress:D.V.SkobeltsynInstituteofNuclearPhysicsoftheLomonosov,MoscowStateUniversi
8、ty,Moscow,typeshavetheirownmeritsanddemerits.ForRussia.example,griddedsources,havingtheiroriginfrom0168-583X/$-seefrontmatterÓ2005ElsevierB.V.Allrightsreserved.doi:10.1016/j.nimb.2
