Lam3 Aluminum RIE Etcher.pdf

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1、Lam3AluminumRIEEtcher(lam3)1.01.0TitleLam3AluminumRIEEtcher2.02.0PurposeLam3isanautomatic,cassette-to-cassette,singlewaferRIEetcherforaluminumfilmetching.3.03.0ScopeThisdocumentdescribesthegeneraloperationofLam3.Italsocoverstherecipeloading/modifyingproceduresandho

2、wtosetuptheautomaticendpointdetection.4.04.0ApplicableDocuments4.1Chapter7.0oftheMicrolabManual(LamEtchersOverview)4.2AutoEtchPlasmaEtchSystem,OperationandMaintenanceManual,LamResearch,1989.(ThereisacopyintheMicrolaboffice.)5.05.0Definitions&ProcessTerminology5.15.

3、1RIEEtcher:Anetcherthatusestheradicalgasatoms/molecules,generatedbyplasma,asthemainetchantstoremovethethinfilmmaterialonasubstrateorthesubstrateitself.Inaddition,theprocesswaferssitsontheRFpoweredelectrode,hencealargeelectricalbiaswillattractpositivechargedioninthe

4、plasmatobombardthewafersurface.Theaddedionbombardmentwillincreasetheetchrateandmakeetchbyproductmorevolatile.5.25.2PoweredLoadLock(PLL):Lam3usedtheexitloadlocktopassivatetheetchedaluminumsurface.ItusesCF4/O2plasmatoreplacetheClresidueontheetchsurfaceandinthephoto-r

5、esist.Italsoresultsinaprotectivefilmonthealuminumsurface.5.35.3EtchRate(ER):Therateofthethinfilmbeingetchedaway,usuallyinA/minute.5.45.4EtchNon-Uniformity:Ameasureoftheetchuniformity.Itisdefinedas(maxER–minER)/(2XaverageER),usuallyin%.5.55.5Isotropic/AnisotropicEtc

6、h:AnetchprocessthathasthesameERinalldirectionsisisotropic.Anetchprocessthatetchesinthedirectionperpendiculartothesubstratesurfaceisanisotropic.Aplasmaetcher,e.g.Lam1usuallyetchesmoreanisotropically.5.65.6EtchSelectivity:TheratioofERsbetweentheetchedthinfilmandtheun

7、derlyingsubstrate/thinfilm.5.75.7Over-Etch:Anoptionalsecondetchstepwithetchchemistrythatmaximizestheetchselectivity.Itremovestheresidualfilmduetopreviousetchnon-uniformitywithminimumdamagetotheunderlyingsubstrate/film.Theetchrateisusuallylowerinthisstep.5.85.8Autom

8、aticEndpointDetector:Anopticaldevicethattracesthelightemittedbytheetchbyproductintheplasma.Itcanbeprogrammedtoendtheetchprocessataspecifiedcondit