资源描述：
《(12)Uncooled infrared imaging using bimaterial microcantilever arrays.pdf》由会员上传分享，免费在线阅读，更多相关内容在学术论文-天天文库。
1、APPLIEDPHYSICSLETTERS89,0731182006UncooledinfraredimagingusingbimaterialmicrocantileverarraysaD.Grbovic,N.V.Lavrik,andP.G.DatskosOakRidgeNationalLaboratory,OakRidge,Tennessee37931-6054andUniversityofTennessee,Knoxville,Tennessee37996-1200D.Forrai,E.Ne
2、lson,andJ.DevittL-3CommunicationsCincinnatiElectronics,Mason,Ohio45040-9699B.McIntyreElectro-OpticsCenter,PennStateUniversity,Freeport,Pennsylvania16229Received12May2006;accepted27June2006;publishedonline18August2006Wereportonfabricationandcharacteriza
3、tionofarraysofbimaterialmicrocantileversanddiscusstheirperformanceasuncooledinfraredimagers.Anopticalreadoutwasusedtosimultaneouslymeasuredeßectionsofallmicrocantileversinthearray.ThefabricatedarrayshadanaveragenoiseequivalenttemperaturedifferenceNETDa
4、ndaresponsetimeof1.5Kand6ms,respectively.SomemicrocantileversinthearrayexhibitedNETDvaluesbelow500mK,approachingourtheoreticalpredictionof151mK.Auniqueandvaluablefeatureoftheimplementedapproachisitsstraightforwardscalabilitytohigherresolutionarrays,witho
5、utprogressivelygrowingcomplexityandcost.©2006AmericanInstituteofPhysics.DOI:10.1063/1.2337083InfraredIRradiationdetectorscanbeclassiÞedtransducerconsistedofanIRabsorbingarea,abimaterialbroadlyaseitherquantumelectro-opticorthermaldetec-region,andath
6、ermalisolationregion.Wefabricatedanarraytors,suchaspyroelectric,thermoelectric,thermoresistive256256ofsuchstructuresusinglowstressSiNxasstruc-1Ð3bolometers,andbimaterialmicrocantileverdetectors.turalmaterialandAuasasecondlayerinthebimaterial2Thermal
7、IRdetectorsarebasedonmeasuringtheamountofregion.Figure1showsanionmicrographofaportionoftheheatproducedinthedetectorupontheabsorptionofIRra-arraywitha7575m2pitch.Alsoshownintheinsertisadiationandcanoperateat,orevenabove,roomtemperaturesclose-upofanindiv
8、idualmicrocantileverwherethepattern-sincethermalnoiseinthermaldetectorsvarieslinearlyratheringofthedepositedmetalAulayercanbeseen.Thethanexponentiallywithtemperature.brighterareasonthedetectorheadandbimaterialregionsInre
