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1、SANDIAREPORTSAND2004-6185UnlimitedReleasePrintedDecember2004Nano-electromechanicalOscillators(NEMOs)forRFTechnologiesJ.P.Sullivan,T.A.Friedmann,D.A,Czaplewski,C.W.Dyck,J.R.Webster,A.J.Carton,D.W.Carr,B.E.N.Keeler,J.R.Wendt,D.R.Tallant,B.L.Boyce,X.Chen,andJ.M.Gib
2、sonPreparedbySandiaNationalLaboratoriesAlbuquerque,NewMexico87185andLivermore,California94550SandiaisamultiprogramlaboratoryoperatedbySandiaCorporation,aLockheedMartinCompany,fortheUnitedStatesDepartmentofEnergy’sNationalNuclearSecurityAdministrationunderContrac
3、tDE-AC04-94AL85000.Approvedforpublicrelease;furtherdisseminationunlimited.-1-IssuedbySandiaNationalLaboratories,operatedfortheUnitedStatesDepartmentofEnergybySandiaCorporation.NOTICE:ThisreportwaspreparedasanaccountofworksponsoredbyanagencyoftheUnitedStatesGover
4、nment.NeithertheUnitedStatesGovernment,noranyagencythereof,noranyoftheiremployees,noranyoftheircontractors,subcontractors,ortheiremployees,makeanywarranty,expressorimplied,orassumeanylegalliabilityorresponsibilityfortheaccuracy,completeness,orusefulnessofanyinfo
5、rmation,apparatus,product,orprocessdisclosed,orrepresentthatitsusewouldnotinfringeprivatelyownedrights.Referencehereintoanyspecificcommercialproduct,process,orservicebytradename,trademark,manufacturer,orotherwise,doesnotnecessarilyconstituteorimplyitsendorsement
6、,recommendation,orfavoringbytheUnitedStatesGovernment,anyagencythereof,oranyoftheircontractorsorsubcontractors.TheviewsandopinionsexpressedhereindonotnecessarilystateorreflectthoseoftheUnitedStatesGovernment,anyagencythereof,oranyoftheircontractors.PrintedintheU
7、nitedStatesofAmerica.Thisreporthasbeenreproduceddirectlyfromthebestavailablecopy.AvailabletoDOEandDOEcontractorsfromU.S.DepartmentofEnergyOfficeofScientificandTechnicalInformationP.O.Box62OakRidge,TN37831Telephone:(865)576-8401Facsimile:(865)576-5728E-Mail:repor
8、ts@adonis.osti.govOnlineordering:http://www.osti.gov/bridgeAvailabletothepublicfromU.S.DepartmentofCommerceNationalTechnicalInformationService5285PortRoyalRdSpringfie
