mems微针制备技术及其工艺的研究论文

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1、ADissertationSubmittedtoShanghaiJiaoTongUniversityfortheDegreeofMasterThetechnologyofpreparationofMEMSmicro-needleandresearchofitsProcessAuthor：JiangHongminSpecialty:MicroelectronicsAdvisorⅠ:Prof.ZhaoxiaolinAdvisorⅡ:AssociateProf.ZhuJunResearchInstituteofMicro/NanoScienceandTechnology

2、ShanghaiJiaoTongUniversityShanghai,P.R.ChinaJanuary12th,2009MEMS微针制备技术及其工艺研究摘要微针作为一种新型MEMS器件，在生物医学领域具有广泛的应用需求。从制备工艺来划分，微针可分为异平面微针与同平面微针。异平面微针可以加工成阵列结构，因而在微针经皮给药应用时药物可以在皮肤上大面积分布，具有较强的给药能力。异平面微针属于特殊的三维微结构，传统平面微加工工艺不能满足其结构要求。本论文从国内外的微针制备的研究现状分析，从现有微针加工过程中存在的不足出发，在对背面曝光和倾斜旋转曝光的理论研究的基础之上，开

3、展相应的实验研究，期望在对两种方法深入研究的基础之上，能够开发简便易行的微针制备技术。通过改进实验室现有设备，实现SU8胶的倾斜旋转曝光，并以SU8光刻胶结构为模具通过图形转移制备了PDMS异平面圆锥形微针阵列，以此工艺为基础进一步尝试Ni异平面圆锥形实心微针阵列和环氧树脂异平面空心微针的制备。关键词：背面曝光，倾斜旋转曝光，异平面空心微针-I-ThetechnologyofpreparationofMEMSmicro-needleandresearchofitsProcessAbstractMicroneedleshavebecomeanattractiveto

4、picofMEMSresearch.Microneedlescanbeclassifiedintotwotype,theyarein-planeandout-of-planemicroneedlerepectively.Thein-planetypegenerallyhasonlyonerowofneedles,andtheout-of-planeneedlescancontainarraysofmicroneedle.Theout-of-planeneedlesallowfordrugdistributionoveralargeareaofskin.Out-of

5、-planemicro-needlehasaspecialthree-dimensionalmicro-structure,sothetraditionalplanarmicrofabricationtechnologycannotmeetitsrequirements.Inthispaper,weintroducedtheactualresearchsituationinmicroneedleandanalyzedtheexistingkeyproblems.Thenwetakethebacksideexposureandinclinedandrotatingl

6、ithographyasourresearchemphasis.ThetwokindsofexposurearebasedonUV-LIGAtechnology.Basedonthesimulationandexperimentalresearch,wehopetodevelopasimplemanufacturetechnology.Inthispaper,weimprovedtheexistingequipmentofourlaboratoryandverifiedthatbothbacksideexposureandinclinedandrotatingli

7、thographyalsosuittobeusedinthemanufactureofthreedimentionmicostructure.Wesuccessfullyproducedconicalout-of-planemicro-needlesofPDMSthroughpatterntransferbetweenpolymermaterialsandtheSU8photoresistmold.Andbasedon-II-theprocess,weresearchedtheproductionofconicalout-of-planesolidmicro-ne

8、edles