单刀双掷rfmems开关设计和的研究

《单刀双掷rfmems开关设计和的研究》由会员上传分享，免费在线阅读，更多相关内容在学术论文-天天文库。

1、摘要近年来，射频微电子机械系统(RFMEMS)技术在现代通信领域中越来越受到重视。与传统的半导体开关相比，RFMEMS开关具有低插入损耗、高隔离度、线性度好等优点。随着RFMEMS开关研究地深入及可靠性的提高，其市场会越来越广阔。本文设计了四种单刀双掷RFMEMS开关，这四种开关都是建立在并联固支梁式开关和串联悬臂梁式单刀单掷开关的基础上。通过对单刀双掷开关的讨论与分析，相同的原理可以应用于包含有单刀多掷和双刀双掷的开关阵列中。本文首先分析了并联和串联两种单刀单掷开关的工作原理，在保证特征阻抗匹配和深入研究传输线影响因素的基础上，先进行两种单刀单掷开关的设

2、计。然后根据这两种单刀单掷开关设计出了四种不同结构的单刀双掷开关。单刀双掷开关中两个开关的距离以及输入端的结构是设计时需要重点考虑的。两种并联设计的单刀双掷开关均应用于20~40GHz，串联设计的开关应用于0~20GHz，而另一种单刀双掷开关，一端采用的并联固支梁式开关，另一端采用的串联悬臂梁式开关，当两个输出端的工作频率分别要求处在低频和高频时，具有很高的应用价值。在完成初步设计后，使用AnsoftHFSS软件对开关射频性能进行分析，并且在保证开关射频性能的前提下对开关进行结构上的优化。关键词：RFMEMS开关，单刀双掷，插入损耗，隔离度IABSTRAC

3、TInrecentyears，RFMEMStechnologybecomesmoreandmoreattractiveinthecommunicationfield.Comparingwithtraditionalsemiconductorswitch,ithasthemeritoflowinsertionloss,highisolationandgoodlinearity.Themarketwilldefinitelygrowwithfurtherresearchofswitchandimprovementofswitchlifetime.Fourkin

4、dsofSP2Tswitchesaredesignedinthispaper,whichareallbasedonparallelconnectionofclamped-endbeamswitchandseriesconnectionofcantileverbeamswitch.WiththediscussionandanalysisofSP2Tswitch,thesameprinciplecanbeappliedtothedesignofswitcharrayssuchasSPNTandDP2Tswitches.First，thispaperanalyz

5、estheworkingprincipleofparallelconnectionswitchandseriesconnectionswitch.Onthefoundationoffurtherstudyingandtheassuranceofcharacteristicimpedancematched,twotypicalSP1Tswitchesaredesigned.OnthebasisofthetwoSP1Tswitches,fourSP2Tswitchesaredesigned.Thedistancebetweentwosingleswitches

6、andthestructureofinputportarethekeyconsiderationindesigning.TwokindsofparallelconnectionSP2Tswitchesareusedinfrequenciesfrom20to40GHz.SeriesconnectionSP2Tswitchisusedinfrequenciesfrom0to20GHz.Oneparallelconnectionswitchandoneseriesconnectionswitchareseparatelyconnectedonthetwooutp

7、utportsofthelastSP2Tswitch,whichishighlyvaluablewhentheworkingfrequenciesoftwooutputportsseparatelydemandtobeatlowfrequencyandhighfrequency.Finally,AnsoftHFSSisusedtoanalyzetheRFperformanceofswitches,andstructuresofswitchesareoptimizedunderthepremiseofgoodRFperformanceofswitches.K

8、eywords:RFMEMSswitch,SP2T,inserti