Handbook of Nitride Semiconductors and Devices.pdf

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1、HadisMorkoc¸HandbookofNitrideSemiconductorsandDevicesRelatedTitlesPiprek,J.(ed.)NitrideSemiconductorDevices:PrinciplesandSimulation2007ISBN:978-3-527-40667-8Adachi,S.PropertiesofGroup-IV,III-VandII-VISemiconductors2005ISBN:978-0-470-09032-9Ruterana,P.,Albrecht,M.,Neugebauer,J.(eds.)NitrideSe

2、miconductorsHandbookonMaterialsandDevices2003ISBN:978-3-527-40387-5Ng,K.K.CompleteGuidetoSemiconductorDevices2002ISBN:978-0-471-20240-0HadisMorkoçHandbookofNitrideSemiconductorsandDevicesVol.2:MaterialsProperties,PhysicsandGrowthTheAuthorAllbookspublishedbyWiley-VCHarecarefullyproduced.Never

3、theless,authors,editors,andpublisherdonotwarranttheinformationcontainedProf.Dr.HadisMorkoçinthesebooks,includingthisbook,tobefreeofVirginiaCommonwealthUniversityerrors.ReadersareadvisedtokeepinmindthatDept.ofChemicalEngineeringstatements,data,illustrations,proceduraldetailsorRichmond,VAother

4、itemsmayinadvertentlybeinaccurate.USALibraryofCongressCardNo.:appliedforCoverSPIESZDESIGNGbR,BritishLibraryCataloguing-in-PublicationDataNeu-Ulm,GermanyAcataloguerecordforthisbookisavailablefromtheBritishLibrary.BibliographicinformationpublishedbytheDeutscheNationalbibliothekDieDeutscheNatio

5、nalbibliothekliststhispublicationintheDeutscheNationalbibliografie;detailedbibliographicdataareavailableintheInternetat.#2008WILEY-VCHVerlagGmbH&Co.KGaA,WeinheimAllrightsreserved(includingthoseoftranslationintootherlanguages).Nopartofthisbookmaybereproducedinanyform–byphot

6、oprinting,microfilm,oranyothermeans–nortransmittedortranslatedintoamachinelanguagewithoutwrittenpermissionfromthepublishers.Registerednames,trademarks,etc.usedinthisbook,evenwhennotspecificallymarkedassuch,arenottobeconsideredunprotectedbylaw.TypesettingThomsonDigital,Noida,IndiaPrintingStraus

7、sGmbh,MörlenbachBindingLitges&DopfGmbH,HeppenheimPrintedintheFederalRepublicofGermanyPrintedonacid-freepaperISBN:978-3-527-40838-2VContentsPrefaceXIIIColorTablesXXI1MetalContactstoGaNandProcessing1Introduction11.1APrimerforSemiconductor–MetalContac