基于su-8光刻胶的微透镜及阵列的研究

基于su-8光刻胶的微透镜及阵列的研究

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时间:2019-03-03

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1、万方数据摘要II万方数据AbstractWiththedevelopmentofMOEMS(Micro-Optical—Electro—MechanicalSystem),thedemandforminiaturizationoftheopticalelementisincreasing.Aslensisoneofthemostcrucialelementoftheopticalsystem,miniaturizationofthelenshasbecometheresearchfocus.Inrecentyears,manyresearchinstitutionsanduniversit

2、ieshavebeenconductingtheresearchaboutthemicrolensandmanymicrolensfabricationmethodshavebeenproposed.Amongthem,thephotoresistreflowmethodhasbecomethefocusofmanyresearchers’study.BasedonthedeepultrauialeLlithography,anewphotoresistfabricationmethodisproposedinthisthesis.Themicrolensarrayswerefabrica

3、tedbasedonsurfacetensionwhenheatingtemperatureisoverglasstransitiontemperatureofSU-8photoresist.Themaincontentsofthisthesisaresunmaafizedasfollows:1.Themicrolensfabricationmethodswereresearchedandanalyzedandthedomesticandforeignresearchstatusandprogressofmicrolensfabricationmethodswereinvestigated

4、.TheSU-8resistfabricationprocesshasbeenstudied.Basedontheconventionalphotoresistreflowmethod,anewmethodforfabricatingthemicrolenshasbeenproposedinthisthesis.Thetheoreticalanalysisoftheformationmechanismofmicrolenshasbeenconducted.Theoretically,theinfluencefactorstocontrolthemorphologyofthemicrolen

5、swerediscussed.Thefabricationprocesstoleranceandconsistencywereanalyzed.Basedontheproposedphotoresistfabricationmethod,severalexperimentshavebeenmadetoexploreandstudytheeffectofvariousprocessparametersonthemorphologyofthemicrolens.2.Themorphologyofthemicrolenswasmeasuredbythreemeasuremethods.Theme

6、asuremethodswerewiththesurfaceprofiler,opticalmicroscopy/scanningelectronmicroscopyandthebuiltupopticalsetup,respectively.Accordingtoalargeamotmtofexperimentaldata,theeffectofvariousprocessparametersonthemorphologyofthemicrolenshasbeenanalyzed.Theeffectofthewidthofphotoresistmicrostructure,theheig

7、htofcoatingphotoresist,post-bakingprocedureonthemorphologyofmicrolenshavebeendiscussedandanalyzed.Thefocallengthofmicrolenswereobtainedbytwomethodsandtheopticalperformancehasbeenanalyzedandevaluated.Finally,thefi

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