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ID:34189433
大小:9.19 MB
页数:55页
时间:2019-03-03
《基于su-8光刻胶的微透镜及阵列的研究》由会员上传分享,免费在线阅读,更多相关内容在教育资源-天天文库。
1、万方数据摘要II万方数据AbstractWiththedevelopmentofMOEMS(Micro-Optical—Electro—MechanicalSystem),thedemandforminiaturizationoftheopticalelementisincreasing.Aslensisoneofthemostcrucialelementoftheopticalsystem,miniaturizationofthelenshasbecometheresearchfocus.Inrecentyears,manyresearchinstitutionsanduniversit
2、ieshavebeenconductingtheresearchaboutthemicrolensandmanymicrolensfabricationmethodshavebeenproposed.Amongthem,thephotoresistreflowmethodhasbecomethefocusofmanyresearchers’study.BasedonthedeepultrauialeLlithography,anewphotoresistfabricationmethodisproposedinthisthesis.Themicrolensarrayswerefabrica
3、tedbasedonsurfacetensionwhenheatingtemperatureisoverglasstransitiontemperatureofSU-8photoresist.Themaincontentsofthisthesisaresunmaafizedasfollows:1.Themicrolensfabricationmethodswereresearchedandanalyzedandthedomesticandforeignresearchstatusandprogressofmicrolensfabricationmethodswereinvestigated
4、.TheSU-8resistfabricationprocesshasbeenstudied.Basedontheconventionalphotoresistreflowmethod,anewmethodforfabricatingthemicrolenshasbeenproposedinthisthesis.Thetheoreticalanalysisoftheformationmechanismofmicrolenshasbeenconducted.Theoretically,theinfluencefactorstocontrolthemorphologyofthemicrolen
5、swerediscussed.Thefabricationprocesstoleranceandconsistencywereanalyzed.Basedontheproposedphotoresistfabricationmethod,severalexperimentshavebeenmadetoexploreandstudytheeffectofvariousprocessparametersonthemorphologyofthemicrolens.2.Themorphologyofthemicrolenswasmeasuredbythreemeasuremethods.Theme
6、asuremethodswerewiththesurfaceprofiler,opticalmicroscopy/scanningelectronmicroscopyandthebuiltupopticalsetup,respectively.Accordingtoalargeamotmtofexperimentaldata,theeffectofvariousprocessparametersonthemorphologyofthemicrolenshasbeenanalyzed.Theeffectofthewidthofphotoresistmicrostructure,theheig
7、htofcoatingphotoresist,post-bakingprocedureonthemorphologyofmicrolenshavebeendiscussedandanalyzed.Thefocallengthofmicrolenswereobtainedbytwomethodsandtheopticalperformancehasbeenanalyzedandevaluated.Finally,thefi
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