基于su-8光刻胶的微透镜及阵列的-研究

基于su-8光刻胶的微透镜及阵列的-研究

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时间:2019-03-03

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1、万方数据摘要II万方数据AbstractWiththedevelopmentofMOEMS(Micro-Optical—Electro—MechanicalSystem),thedemandforminiaturizationoftheopticalelementisincreasing.Aslensisoneofthemostcrucialelementoftheopticalsystem,miniaturizationofthelenshasbecometheresearchfocus.Inrecentyear

2、s,manyresearchinstitutionsanduniversitieshavebeenconductingtheresearchaboutthemicrolensandmanymicrolensfabricationmethodshavebeenproposed.Amongthem,thephotoresistreflowmethodhasbecomethefocusofmanyresearchers’study.BasedonthedeepultrauialeLlithography,anewphot

3、oresistfabricationmethodisproposedinthisthesis.ThemicrolensarrayswerefabricatedbasedonsurfacetensionwhenheatingtemperatureisoverglasstransitiontemperatureofSU-8photoresist.Themaincontentsofthisthesisaresunmaafizedasfollows:1.Themicrolensfabricationmethodswerer

4、esearchedandanalyzedandthedomesticandforeignresearchstatusandprogressofmicrolensfabricationmethodswereinvestigated.TheSU-8resistfabricationprocesshasbeenstudied.Basedontheconventionalphotoresistreflowmethod,anewmethodforfabricatingthemicrolenshasbeenproposedin

5、thisthesis.Thetheoreticalanalysisoftheformationmechanismofmicrolenshasbeenconducted.Theoretically,theinfluencefactorstocontrolthemorphologyofthemicrolenswerediscussed.Thefabricationprocesstoleranceandconsistencywereanalyzed.Basedontheproposedphotoresistfabrica

6、tionmethod,severalexperimentshavebeenmadetoexploreandstudytheeffectofvariousprocessparametersonthemorphologyofthemicrolens.2.Themorphologyofthemicrolenswasmeasuredbythreemeasuremethods.Themeasuremethodswerewiththesurfaceprofiler,opticalmicroscopy/scanningelect

7、ronmicroscopyandthebuiltupopticalsetup,respectively.Accordingtoalargeamotmtofexperimentaldata,theeffectofvariousprocessparametersonthemorphologyofthemicrolenshasbeenanalyzed.Theeffectofthewidthofphotoresistmicrostructure,theheightofcoatingphotoresist,post-baki

8、ngprocedureonthemorphologyofmicrolenshavebeendiscussedandanalyzed.Thefocallengthofmicrolenswereobtainedbytwomethodsandtheopticalperformancehasbeenanalyzedandevaluated.Finally,thefi

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