基于su-8光刻胶的微透镜及阵列的-研究

《基于su-8光刻胶的微透镜及阵列的-研究》由会员上传分享，免费在线阅读，更多相关内容在教育资源-天天文库。

1、万方数据摘要II万方数据AbstractWiththedevelopmentofMOEMS(Micro-Optical—Electro—MechanicalSystem)，thedemandforminiaturizationoftheopticalelementisincreasing．Aslensisoneofthemostcrucialelementoftheopticalsystem，miniaturizationofthelenshasbecometheresearchfocus．Inrecentyear

2、s，manyresearchinstitutionsanduniversitieshavebeenconductingtheresearchaboutthemicrolensandmanymicrolensfabricationmethodshavebeenproposed．Amongthem，thephotoresistreflowmethodhasbecomethefocusofmanyresearchers’study．BasedonthedeepultrauialeLlithography，anewphot

3、oresistfabricationmethodisproposedinthisthesis．ThemicrolensarrayswerefabricatedbasedonsurfacetensionwhenheatingtemperatureisoverglasstransitiontemperatureofSU-8photoresist．Themaincontentsofthisthesisaresunmaafizedasfollows：1．Themicrolensfabricationmethodswerer

4、esearchedandanalyzedandthedomesticandforeignresearchstatusandprogressofmicrolensfabricationmethodswereinvestigated．TheSU-8resistfabricationprocesshasbeenstudied．Basedontheconventionalphotoresistreflowmethod，anewmethodforfabricatingthemicrolenshasbeenproposedin

5、thisthesis．Thetheoreticalanalysisoftheformationmechanismofmicrolenshasbeenconducted．Theoretically，theinfluencefactorstocontrolthemorphologyofthemicrolenswerediscussed．Thefabricationprocesstoleranceandconsistencywereanalyzed．Basedontheproposedphotoresistfabrica

6、tionmethod，severalexperimentshavebeenmadetoexploreandstudytheeffectofvariousprocessparametersonthemorphologyofthemicrolens．2．Themorphologyofthemicrolenswasmeasuredbythreemeasuremethods．Themeasuremethodswerewiththesurfaceprofiler，opticalmicroscopy／scanningelect

7、ronmicroscopyandthebuiltupopticalsetup，respectively．Accordingtoalargeamotmtofexperimentaldata，theeffectofvariousprocessparametersonthemorphologyofthemicrolenshasbeenanalyzed．Theeffectofthewidthofphotoresistmicrostructure，theheightofcoatingphotoresist，post-baki

8、ngprocedureonthemorphologyofmicrolenshavebeendiscussedandanalyzed．Thefocallengthofmicrolenswereobtainedbytwomethodsandtheopticalperformancehasbeenanalyzedandevaluated．Finally，thefi