高速、高精度微纳米压印关键技术的研究

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1、万方数据High-speed，High-precisionMicro／nano—imprintLithographyKeyTechnologyResearchABSTRACTNano-imprintlithographyisakindofnewmicro／nanographicreproductiontechnology,comparedtotheelectron／ionbeamlithography,UVlithographyandothermicro／nanoprocessingmethod，andh

2、astheadvantagesofsimpleoperation，higlllimitresolution(

3、．However,thecurrentinternationalimprinting--formatofsinglesealnano··imprintlithographyisthebiggestsupportfor20cm(Sin)wafer,andisnotonlyhighcost，butalsocannotmeettherequirementsoflarge·formatimprintingofmicro／nanostructure，whichmakestheapplicationfieldofmi

4、cro／nanoimprinttechnologylimited．Thepaperproposedaftertheresearch”micro-regionseal”high-speed，high-precisionstepcontinuousimprintingdrivingmode,toachievelarge—format(一>400mm×400mm)imprintingofmicro／nanostructure．Thatis”high-speed，high-precisionmicro／nano-

5、imprintlithographykeytechnologyresearch”asthetopicfortheresearchwork．Thespecificcontentsareasfollows：(1)Thepaperfirststudiesrelatedtechnologyresearchanddevelopmentsituationofthedomesticandforeign，andonthebasisofanalysisandresearchhasestablishedthemaincont

6、entoftheresearchandthebasicideatosolvetheproblem．(2)Accordingtotherequirementsofthesystemdesign．withthecomparisonofschemedesignofmicro／nano-imprintlithography,andfinallyahi曲-speed，high-precisionstepcontinuousimprintingcombinedmiero／nano-imprintlithography

7、schemebasedonpermanentmagnetsynchronouslinearmotordrivenisestablished．III万方数据ABSTRACTHigh·speed，High-precisionMicro／nano-imprintLithographyKeyTechnologyResearch(3)Theaimingatdesignscheme，combinedwiththemechanicalandelectricaldrivesystem，andmathematicalmod

8、elof”hi曲-speed，high—precisionstepcontinuousimprintingcombinedmicro／nano—imprint”systemisestablished．(4)Accordingtothedesignschemeandthemathematicalmodel．andhaveperformeddesignselectionofthekeystructure：linearmotor,l